A new two-dimensional fast steering mirror based on piezoelectric actuators
文献类型：会议论文
| 作者 | Chen Wei; Chen Sihai; Wu Xin; Luo Dong |
| 出版日期 | 2014 |
| 会议名称 | Information Science and Technology (ICIST), 2014 4th IEEE International Conference on |
| 会议地点 | 中国 |
| 英文摘要 | A new two-dimensional fast steering mirror (FSM) based on piezoelectric actuators is designed, which has high scanning angle and resonance frequency. The FSM is driven by three piezoelectric actuators. Each piezoelectric actuator and its displacement amplification mechanism compose of the Amplified Piezoelectric Actuator (APA).The three APAs have I29a staggered arrangement to acquire compact structure and close driven point. The mechanism structure and principle J29of the FSM are introduced. The algorithm of decoupling and hysteresis compensation is proposed. In order to test the performance of the FSM, a performance test system is built up. The test result shows that the FSM has a two-dimensional scanning angle of 2̓,two axis’ nonlinearities of 1.7% and 1.1% after compensation and main resonance frequency of 640Hz and 1290Hz. J34 |
| 收录类别 | EI |
| 语种 | 英语 |
| 源URL | [http://ir.siat.ac.cn:8080/handle/172644/5519]  |
| 专题 | 深圳先进技术研究院_集成所 |
| 作者单位 | 2014 |
| 推荐引用方式 GB/T 7714 | Chen Wei,Chen Sihai,Wu Xin,et al. A new two-dimensional fast steering mirror based on piezoelectric actuators[C]. 见:Information Science and Technology (ICIST), 2014 4th IEEE International Conference on. 中国. |
入库方式： OAI收割
来源：深圳先进技术研究院
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