Characterization of nanostructured titania thin film and its application in gas sensor
文献类型：会议论文
| 作者 | Tang, Guanrong; Chen, Jing |
| 出版日期 | 2012 |
| 会议名称 | 2nd International Forum on Micro Manufacturing, IFMM 2012 |
| 会议地点 | S China Univ Techn, Guangzhou, PEOPLES R CHINA |
| 英文摘要 | In this paper, Nanostructured Titania (NST) was fabricated by aging titanium film in hydrogen peroxide solution. NST was analyzed and characterized using scanning electron microscope (SEM), X-ray photoelectron spectroscopy (XPS), energy-dispersive X-ray spectroscopy (EDX), X-ray diffraction (XRD), nano-indentation method and the BET method. Results showed that NST was porous TiO2 with pore diameter of 90-133 nm, hardness of 1.35Gpa, and specific surface area of 37.26 m2/g. Gas sensors using NST film as sensitive material were presented in this paper too. Electrodes were deposited upon NST patterns to create electrical connections. Gas sensors with a simple package were successfully fabricated. |
| 收录类别 | EI |
| 语种 | 英语 |
| 源URL | [http://ir.siat.ac.cn:8080/handle/172644/4347]  |
| 专题 | 深圳先进技术研究院_南沙所 |
| 作者单位 | 2012 |
| 推荐引用方式 GB/T 7714 | Tang, Guanrong,Chen, Jing. Characterization of nanostructured titania thin film and its application in gas sensor[C]. 见:2nd International Forum on Micro Manufacturing, IFMM 2012. S China Univ Techn, Guangzhou, PEOPLES R CHINA. |
入库方式： OAI收割
来源：深圳先进技术研究院
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