Design and Simulation of Piezoresistive Pressure Sensor for Ocean Depth Measurements
文献类型：会议论文
| 作者 | Tang, Guanrong; Di, Si; Xu, Xin; Chen, Qiulan |
| 出版日期 | 2013 |
| 会议名称 | 2nd International Conference on Information Technology and Management Innovation, ICITMI 2013 |
| 会议地点 | Zhuhai, PEOPLES R CHINA |
| 英文摘要 | This paper presents the design and simulation of a piezoresistive pressure sensor with wide operation range (up to the pressure of 1000 m-deep water). Structural and electrical simulations were carried out using COMSOL Multiphysics 4.3. The dimension of the membrane, and the geometry and placement ofpiezoresistors, were optimized through structural simulations. Electrical simulations were used to evaluate the performance of selected sensors. The output characteristics revealed good linearity throughout the measurement range with sensitivities of 0.4500 similar to 0.8964 mV/V/MPa. The optimum design ofsensor was determined according to the simulation results. |
| 收录类别 | EI |
| 语种 | 英语 |
| 源URL | [http://ir.siat.ac.cn:8080/handle/172644/5329]  |
| 专题 | 深圳先进技术研究院_南沙所 |
| 作者单位 | 2013 |
| 推荐引用方式 GB/T 7714 | Tang, Guanrong,Di, Si,Xu, Xin,et al. Design and Simulation of Piezoresistive Pressure Sensor for Ocean Depth Measurements[C]. 见:2nd International Conference on Information Technology and Management Innovation, ICITMI 2013. Zhuhai, PEOPLES R CHINA. |
入库方式： OAI收割
来源：深圳先进技术研究院
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