中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Numerical and experimental analysis on green laser crystallization of amorphous silicon thin films

文献类型:期刊论文

作者Yuan Zhijun ; Lou QH(楼祺洪) ; Zhou J(周军) ; Dong JX(董景星) ; Wei YR(魏运荣) ; Wang ZJ(王之江) ; Zhao Hongming ; Wu GH(吴国华)
刊名opt. laser technol.
出版日期2009
卷号41期号:4页码:380
关键词Thin film Laser crystallization Polycrystalline silicon Finite difference simulation
ISSN号0030-3992
中文摘要the effect of laser fluence on the crystallization of amorphous silicon irradiated by a frequency-doubled nd:yag laser is studied both theoretically and experimentally. an effective numerical model is set up to predict the melting threshold and the optimized laser fluence for the crystallization of 200-nm-thick amorphous silicon. the variation of the temperature distribution with time and the melt depth is analyzed. besides the model, the raman spectra of thin films treated with different fluences are measured to confirm the phase transition and to determine the optimized fluence. the calculating results accord well with those obtained from the experimental data in this research. (c) 2008 elsevier ltd. all rights reserved.
语种英语
WOS记录号WOS:000264274300003
公开日期2009-09-18
源URL[http://ir.siom.ac.cn/handle/181231/2881]  
专题上海光学精密机械研究所_先进激光技术与应用系统实验室
推荐引用方式
GB/T 7714
Yuan Zhijun,Lou QH,Zhou J,et al. Numerical and experimental analysis on green laser crystallization of amorphous silicon thin films[J]. opt. laser technol.,2009,41(4):380, 383.
APA Yuan Zhijun.,楼祺洪.,周军.,董景星.,魏运荣.,...&吴国华.(2009).Numerical and experimental analysis on green laser crystallization of amorphous silicon thin films.opt. laser technol.,41(4),380.
MLA Yuan Zhijun,et al."Numerical and experimental analysis on green laser crystallization of amorphous silicon thin films".opt. laser technol. 41.4(2009):380.

入库方式: OAI收割

来源:上海光学精密机械研究所

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