Numerical and experimental analysis on green laser crystallization of amorphous silicon thin films
文献类型：期刊论文
| 作者 | Yuan Zhijun ; Lou QH(楼祺洪) ; Zhou J(周军) ; Dong JX(董景星) ; Wei YR(魏运荣) ; Wang ZJ(王之江) ; Zhao Hongming ; Wu GH(吴国华) |
| 刊名 | opt. laser technol.
 |
| 出版日期 | 2009 |
| 卷号 | 41期号:4页码:380 |
| 关键词 | Thin film Laser crystallization Polycrystalline silicon Finite difference simulation |
| ISSN号 | 0030-3992 |
| 中文摘要 | the effect of laser fluence on the crystallization of amorphous silicon irradiated by a frequency-doubled nd:yag laser is studied both theoretically and experimentally. an effective numerical model is set up to predict the melting threshold and the optimized laser fluence for the crystallization of 200-nm-thick amorphous silicon. the variation of the temperature distribution with time and the melt depth is analyzed. besides the model, the raman spectra of thin films treated with different fluences are measured to confirm the phase transition and to determine the optimized fluence. the calculating results accord well with those obtained from the experimental data in this research. (c) 2008 elsevier ltd. all rights reserved. |
| 语种 | 英语 |
| WOS记录号 | WOS:000264274300003 |
| 公开日期 | 2009-09-18 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/2881]  |
| 专题 | 上海光学精密机械研究所_先进激光技术与应用系统实验室 |
| 推荐引用方式 GB/T 7714 | Yuan Zhijun,Lou QH,Zhou J,et al. Numerical and experimental analysis on green laser crystallization of amorphous silicon thin films[J]. opt. laser technol.,2009,41(4):380, 383. |
| APA | Yuan Zhijun.,楼祺洪.,周军.,董景星.,魏运荣.,...&吴国华.(2009).Numerical and experimental analysis on green laser crystallization of amorphous silicon thin films.opt. laser technol.,41(4),380. |
| MLA | Yuan Zhijun,et al."Numerical and experimental analysis on green laser crystallization of amorphous silicon thin films".opt. laser technol. 41.4(2009):380. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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