Spatial distribution of crystalline quality in N-type GaN grown on patterned sapphire substrate
文献类型：期刊论文
| 作者 | Jiang, T; Xu, SR; Zhang, JC; Li, PX; Huang, J(黄俊); Ren, ZY; Fu, MD; Zhu, JD; Shan, HS; Zhao, Y |
| 刊名 | OPTICAL MATERIALS EXPRESS
 |
| 出版日期 | 2016 |
| 卷号 | 6期号:6 |
| 通讯作者 | Xu, SR |
| 英文摘要 | The epitaxial layers of n-type GaN were grown on both planar and patterned sapphire substrate (PSS) by metal organic chemical vapor deposition. By comparing the epitaxial layers grown on planar substrate, GaN grown on PSS exhibited many improvements both on surface morphology and crystalline quality according to the characterization of atoms force microscopy, and high resolution X-ray diffraction. Spatially resolved micro-Raman scattering results were performed for mapping the spatial variations in crystalline quality of the n-type GaN grown on PSS. According to the variations on the intensity and the full width at half maximum of GaN E-2 (high) peaks, crystalline quality improvement occurred in the lateral growth regions which correspond to center region of the pyramid patterns. We proposed that the bending of dislocations during the lateral growth plays an important role in the spatial variations of GaN crystalline quality. Cross sectional transmission electron microscope and spatial cathodoluminescence mapping results further supported the explanation of the dislocation inhibition during the growth process of GaN grown on PSS. (C) 2016 Optical Society of America |
| 关键词[WOS] | LIGHT-EMITTING-DIODES ; INGAN-BASED LEDS ; MECHANISM ; SIO2 |
| 收录类别 | SCI ; EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000377507100006 |
| 源URL | [http://ir.sinano.ac.cn/handle/332007/4838]  |
| 专题 | 苏州纳米技术与纳米仿生研究所_测试分析平台 |
| 推荐引用方式 GB/T 7714 | Jiang, T,Xu, SR,Zhang, JC,et al. Spatial distribution of crystalline quality in N-type GaN grown on patterned sapphire substrate[J]. OPTICAL MATERIALS EXPRESS,2016,6(6). |
| APA | Jiang, T.,Xu, SR.,Zhang, JC.,Li, PX.,Huang, J.,...&Hao, Y.(2016).Spatial distribution of crystalline quality in N-type GaN grown on patterned sapphire substrate.OPTICAL MATERIALS EXPRESS,6(6). |
| MLA | Jiang, T,et al."Spatial distribution of crystalline quality in N-type GaN grown on patterned sapphire substrate".OPTICAL MATERIALS EXPRESS 6.6(2016). |
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