中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Initial heteroepitaxial growth and characterization of GaAs on Ge (100) by all-solid-source molecular beam epitaxy

文献类型:期刊论文

作者He, W; Lu, SL(陆书龙); Yang, H(杨辉)
刊名JOURNAL OF INFRARED AND MILLIMETER WAVES
出版日期2016
卷号35期号:2
通讯作者He, W
英文摘要The initial heteroepitaxial growth stages of GaAs on Ge (100) by all-solid-source molecular beam epitaxy (MBE) were studied by means of reflection high-energy electron diffraction (RHEED), high resolution X-ray diffraction (XRD) and atomic force microscopy, as well as the effects of different growth conditions to the epitaxial layer qualities. It was indicated that high growth temperatures or low growth rates enabled a layer-by-layer growth mode of initial GaAs nucleation layer which was evidenced by RHEED patterns. However, the combination of low growth temperatures and low growth rates for the initial GaAs layer gave lower full-width at half-maximum value of rocking curves and lower surface roughness of the epitaxial materials, owing to the decrease of the lattice mismatch between substrates and epi-layers.
收录类别SCI ; EI
语种英语
WOS记录号WOS:000375514900015
源URL[http://ir.sinano.ac.cn/handle/332007/4865]  
专题苏州纳米技术与纳米仿生研究所_纳米器件及相关材料研究部_SONY团队
推荐引用方式
GB/T 7714
He, W,Lu, SL,Yang, H. Initial heteroepitaxial growth and characterization of GaAs on Ge (100) by all-solid-source molecular beam epitaxy[J]. JOURNAL OF INFRARED AND MILLIMETER WAVES,2016,35(2).
APA He, W,Lu, SL,&Yang, H.(2016).Initial heteroepitaxial growth and characterization of GaAs on Ge (100) by all-solid-source molecular beam epitaxy.JOURNAL OF INFRARED AND MILLIMETER WAVES,35(2).
MLA He, W,et al."Initial heteroepitaxial growth and characterization of GaAs on Ge (100) by all-solid-source molecular beam epitaxy".JOURNAL OF INFRARED AND MILLIMETER WAVES 35.2(2016).

入库方式: OAI收割

来源:苏州纳米技术与纳米仿生研究所

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