Optimization for solid polymer microstructure replication using gas-assisted hot embossing under low pressure
文献类型：期刊论文
| 作者 | Wan, L; Zhu, N; Li, X; Zhang, RY(张瑞英); Mei, T |
| 刊名 | INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING
 |
| 出版日期 | 2016 |
| 卷号 | 17期号:8 |
| 通讯作者 | Mei, T |
| 英文摘要 | In order to realize the replication of high-quality polymer microstructures with vertical and smooth sidewalls, a gas-assisted hot embossing process with low pressure supplied was optimized to eliminate the swallowtail phenomenon during pattern transfer and simplify workpiece process setting. With help of passive alignment clamp, the rate of replication greater than 95.5% for vertical sidewalls was successfully obtained under the optimum process condition. Accordingly, a root mean square sidewall roughness of 4.6 nm was measured for polymer trenches in comparison with that of 5.7 nm for the silicon mold using a bevel-cut preparation technique. Furthermore, the rate of bulging of less than 15% for polymer workpiece was also obtained. The experiment has demonstrated that high-precise polymer pattern replication is related to both process settings and mold morphology sizes. |
| 关键词[WOS] | FABRICATION ; MICROFABRICATION ; ALIGNMENT ; FILMS |
| 收录类别 | SCI ; EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000380669000010 |
| 源URL | [http://ir.sinano.ac.cn/handle/332007/4691]  |
| 专题 | 苏州纳米技术与纳米仿生研究所_纳米器件及相关材料研究部_董建荣团队 |
| 推荐引用方式 GB/T 7714 | Wan, L,Zhu, N,Li, X,et al. Optimization for solid polymer microstructure replication using gas-assisted hot embossing under low pressure[J]. INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING,2016,17(8). |
| APA | Wan, L,Zhu, N,Li, X,Zhang, RY,&Mei, T.(2016).Optimization for solid polymer microstructure replication using gas-assisted hot embossing under low pressure.INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING,17(8). |
| MLA | Wan, L,et al."Optimization for solid polymer microstructure replication using gas-assisted hot embossing under low pressure".INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING 17.8(2016). |
入库方式： OAI收割
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。