MOPA pulsed fiber laser for silicon scribing
文献类型：期刊论文
| 作者 | Yang, LM(杨立梅); Huang, W(黄伟); Deng, MM(邓萌萌); Li, F(李丰) |
| 刊名 | OPTICS AND LASER TECHNOLOGY
 |
| 出版日期 | 2016 |
| 卷号 | 80 |
| 通讯作者 | Huang, W(黄伟) |
| 英文摘要 | A 1064 nm master oscillator power amplifier (MOPA) pulsed fiber laser is developed with flexible control over the pulse width, repetition frequency and peak power, and it is used to investigate the dependence of mono-crystalline silicon scribe depth on the laser pulse width, scanning speed and repeat times. Experimental results indicate that long pulses with low peak powers lead to deep ablation depths. We also demonstrate that the ablation depth grows fast with the scanning repeat times at first and progressively tends to be saturated when the repeat times reach a certain level. A thermal model considering the laser pulse overlapping effect that predicts the silicon temperature variation and scribe depth is employed to verify the experimental conclusions with reasonably close agreement. These conclusions are of great benefits to the optimization of the laser material processing with high efficiency. (C) 2016 Elsevier Ltd. All rights reserved. |
| 关键词[WOS] | ABLATION |
| 收录类别 | SCI ; EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000371102200009 |
| 源URL | [http://ir.sinano.ac.cn/handle/332007/4591]  |
| 专题 | 苏州纳米技术与纳米仿生研究所_纳米器件及相关材料研究部_李丰团队 |
| 推荐引用方式 GB/T 7714 | Yang, LM,Huang, W,Deng, MM,et al. MOPA pulsed fiber laser for silicon scribing[J]. OPTICS AND LASER TECHNOLOGY,2016,80. |
| APA | Yang, LM,Huang, W,Deng, MM,&Li, F.(2016).MOPA pulsed fiber laser for silicon scribing.OPTICS AND LASER TECHNOLOGY,80. |
| MLA | Yang, LM,et al."MOPA pulsed fiber laser for silicon scribing".OPTICS AND LASER TECHNOLOGY 80(2016). |
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