Microstructure and mechanical property of TiSiN nanocomposite film with inserted CrAlN nanomultilayers
文献类型：期刊论文
| 作者 | Li, Wei1,2; Liu, Ping1; Meng, Jia2; Zhang, Ke1; Ma, Fengcang1; Liu, Xinkuan1; Chen, Xiaohong1; He, Daihua1 |
| 刊名 | SURFACE & COATINGS TECHNOLOGY
 |
| 出版日期 | 2016-01-25 |
| 卷号 | 286页码:313-318 |
| 关键词 | TiSiN nanocomposite film Nanomultilayers Superhardness effect Microstructure Magnetron sputtering |
| 英文摘要 | A series of TiSiN films inserted by CrAlN nanomultilayers with different thicknesses was prepared by reactive magnetron sputtering. The influences of CrAlN layer thickness on the microstructure and hardness of films were investigated by X-ray diffraction (XRD), high-resolution transmission electron microscopy (HRTEM) and nano-indentation techniques. The insertion of CrAlN nanomultilayers destructs the nanocomposite structure of TiSiN film, leading to the decrease of hardness. As the CrAlN layer thickness increases to 2.5 nm, CrAlN layers are inclined to grow epitaxially with TiSiN layers in order to lower the interfacial energy. As a result, the TiSiN film can be further strengthened with the maximal hardness of 53.9 GPa. As the CrAlN layer thickness further increases to 3.0 nm, the epitaxial growth structure between TiSiN and CrAlN layers is broken, resulting in the deterioration of hardness. (C) 2015 Elsevier B.V. All rights reserved. |
| WOS标题词 | Science & Technology ; Technology ; Physical Sciences |
| 类目[WOS] | Materials Science, Coatings & Films ; Physics, Applied |
| 研究领域[WOS] | Materials Science ; Physics |
| 关键词[WOS] | THERMAL-STABILITY ; SI CONTENT ; SUPERHARD ; COATINGS ; HARDNESS ; THICKNESS ; SYSTEM ; GROWTH ; GPA |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000368965300039 |
| 源URL | [http://ir.sic.ac.cn/handle/331005/23229]  |
| 专题 | 上海硅酸盐研究所_特种无机涂层重点实验室_期刊论文 |
| 作者单位 | 1.Univ Shanghai Sci & Technol, Sch Mat Sci & Engn, Shanghai 200093, Peoples R China 2.Chinese Acad Sci, Key Lab Inorgan Coating Mat, Shanghai 200050, Peoples R China |
| 推荐引用方式 GB/T 7714 | Li, Wei,Liu, Ping,Meng, Jia,et al. Microstructure and mechanical property of TiSiN nanocomposite film with inserted CrAlN nanomultilayers[J]. SURFACE & COATINGS TECHNOLOGY,2016,286:313-318. |
| APA | Li, Wei.,Liu, Ping.,Meng, Jia.,Zhang, Ke.,Ma, Fengcang.,...&He, Daihua.(2016).Microstructure and mechanical property of TiSiN nanocomposite film with inserted CrAlN nanomultilayers.SURFACE & COATINGS TECHNOLOGY,286,313-318. |
| MLA | Li, Wei,et al."Microstructure and mechanical property of TiSiN nanocomposite film with inserted CrAlN nanomultilayers".SURFACE & COATINGS TECHNOLOGY 286(2016):313-318. |
入库方式： OAI收割
来源：上海硅酸盐研究所
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