Low-temperature deposition of VO2 films with high crystalline degree by embedding multilayered structure
文献类型:期刊论文
作者 | Sun, Guangyao1; Cao, Xun1; Li, Xiaoyan3; Bao, Shanhu1; Li, Ning1; Liang, Mengshi1; Gloter, Alexandre2; Gu, Hui1; Jin, Ping1,3 |
刊名 | SOLAR ENERGY MATERIALS AND SOLAR CELLS
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出版日期 | 2017-03-01 |
卷号 | 161页码:70-76 |
关键词 | Low temperature deposition Vanadium dioxide Multilayer structure Epitaxial High degree of crystallinity Smart window |
英文摘要 | It is a long-standing challenge in the fabrication of single-phase VO2 films at low temperature on Si substrate or glass substrate due to their thermodynamic phase-instability and the polymorphic structures. Recently, the demand for high-quality thin films deposited at low temperature is strongly pushed by their applications on devices and smart windows. Thermochromic films of VO2, as well as multilayer films of VO2/ZnO and VO2/ TiO2/ZnO, were made by magnetron sputtering method and characterized by X-ray diffraction (XRD), atomic force microscopy (AFM), UV-visible-NIR spectrophotometer, (scanning) transmission electron microscopy ((S) TEM) and Electron energy loss spectroscopy (EELS). Films with high crystalline degree VO2 single crystal phase were obtained at a fairly low temperature of 300 degrees C without subsequent annealing by embedding ZnO and TiO2 layers between VO2 and substrates. It is demonstrated that VO2/TiO2/ZnO films could display higher luminous transmittance and better semiconductor to metal transition (SMT) performance. Our data can serve a promising point for industrial production with high degree of crystallinity at a low temperature. |
WOS标题词 | Science & Technology ; Technology ; Physical Sciences |
类目[WOS] | Energy & Fuels ; Materials Science, Multidisciplinary ; Physics, Applied |
研究领域[WOS] | Energy & Fuels ; Materials Science ; Physics |
关键词[WOS] | METAL PHASE-TRANSITION ; THIN-FILMS ; THERMOCHROMIC PROPERTIES ; SMART WINDOWS ; GROWTH ; SEMICONDUCTOR ; NANOPARTICLES ; TRANSPARENT ; PERFORMANCE ; DIOXIDE |
收录类别 | SCI |
语种 | 英语 |
WOS记录号 | WOS:000393347000009 |
源URL | [http://ir.sic.ac.cn/handle/331005/23493] ![]() |
专题 | 上海硅酸盐研究所_古陶瓷与工业陶瓷工程研究中心_期刊论文 |
作者单位 | 1.Chinese Acad Sci, Shanghai Inst Ceram, State Key Lab High Performance Ceram & Superfine, Dingxi 1295, Shanghai 200050, Peoples R China 2.Univ Paris 11, Lab Phys Solides, Bat 510, F-91405 Orsay, France 3.Natl Inst Adv Ind Sci & Technol, Mat Res Inst Sustainable Dev, Nagoya, Aichi 4638560, Japan |
推荐引用方式 GB/T 7714 | Sun, Guangyao,Cao, Xun,Li, Xiaoyan,et al. Low-temperature deposition of VO2 films with high crystalline degree by embedding multilayered structure[J]. SOLAR ENERGY MATERIALS AND SOLAR CELLS,2017,161:70-76. |
APA | Sun, Guangyao.,Cao, Xun.,Li, Xiaoyan.,Bao, Shanhu.,Li, Ning.,...&Jin, Ping.(2017).Low-temperature deposition of VO2 films with high crystalline degree by embedding multilayered structure.SOLAR ENERGY MATERIALS AND SOLAR CELLS,161,70-76. |
MLA | Sun, Guangyao,et al."Low-temperature deposition of VO2 films with high crystalline degree by embedding multilayered structure".SOLAR ENERGY MATERIALS AND SOLAR CELLS 161(2017):70-76. |
入库方式: OAI收割
来源:上海硅酸盐研究所
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