Study on eight-pass dual-frequency laser interferometer with nanometer precision
文献类型：期刊论文
| 作者 | Gao HJ(高海军) ; Cheng ZG(程兆谷) ; Zhigao Ning ; Pinjing Cui ; Huang HJ(黄惠杰) |
| 刊名 | chin. opt. lett.
 |
| 出版日期 | 2005 |
| 卷号 | 3期号:9页码:513 |
| 关键词 | 120.0120 instrumentation measurement and metrology 120.3180 interferometry 250.0250 optoelectronics |
| ISSN号 | 1671-7694 |
| 中文摘要 | a new dual-frequency laser displacement measurement interferometer with nanometer precision has been developed. an eight-pass optical subdivision technology is proposed to improve resolution based on commercial interferometers. a static positioning error measuring method has been used to examine the precision and repeatability of the laser interferometer. an optical resolution of 1.24 nm and an accuracy of nanometer scale have been achieved. |
| 收录类别 | EI |
| 语种 | 英语 |
| 公开日期 | 2009-09-24 ; 2010-10-12 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/6219]  |
| 专题 | 上海光学精密机械研究所_精密光电测控研究与发展中心 |
| 推荐引用方式 GB/T 7714 | Gao HJ,Cheng ZG,Zhigao Ning,et al. Study on eight-pass dual-frequency laser interferometer with nanometer precision[J]. chin. opt. lett.,2005,3(9):513, 515. |
| APA | 高海军,程兆谷,Zhigao Ning,Pinjing Cui,&黄惠杰.(2005).Study on eight-pass dual-frequency laser interferometer with nanometer precision.chin. opt. lett.,3(9),513. |
| MLA | 高海军,et al."Study on eight-pass dual-frequency laser interferometer with nanometer precision".chin. opt. lett. 3.9(2005):513. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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