Formation of array microstructures on silicon by multibeam interfered ferntosecond laser pulses
文献类型：期刊论文
| 作者 | Zhao QZ ; Qiu JR(邱建荣) ; Zhao CJ(赵崇军) ; Jiang XW(姜雄伟) ; Zhu CS(朱从善) |
| 刊名 | appl. surf. sci.
 |
| 出版日期 | 2005 |
| 卷号 | 241期号:3~4页码:416 |
| 关键词 | array microstructure interference ferraosecond laser diffractive beam splitter silicon |
| ISSN号 | 0169-4332 |
| 中文摘要 | we report on an optical interference method to fabricate array microstructures on the surface of silicon wafers by means of five-beam interference of femtosecond laser pulses. optical microscope and scanning electron microscope observations revealed microstructures with micrometer-order were fabricated. the diffraction characteristics of the fabricated structures were evaluated. the present technique allows one-step realization of functional optoelectronic devices on silicon surface. (c) 2004 elsevier b.v. all rights reserved. |
| 学科主题 | 光学材料;晶体 |
| 收录类别 | EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000227536800017 |
| 公开日期 | 2009-09-24 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/5465]  |
| 专题 | 上海光学精密机械研究所_激光与光电子功能材料研发中心 |
| 推荐引用方式 GB/T 7714 | Zhao QZ,Qiu JR,Zhao CJ,et al. Formation of array microstructures on silicon by multibeam interfered ferntosecond laser pulses[J]. appl. surf. sci.,2005,241(3~4):416, 419. |
| APA | Zhao QZ,邱建荣,赵崇军,姜雄伟,&朱从善.(2005).Formation of array microstructures on silicon by multibeam interfered ferntosecond laser pulses.appl. surf. sci.,241(3~4),416. |
| MLA | Zhao QZ,et al."Formation of array microstructures on silicon by multibeam interfered ferntosecond laser pulses".appl. surf. sci. 241.3~4(2005):416. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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