Annealing effect on properties of ZnO thin films grown on LiNbO3 substrates by MOCVD
文献类型:期刊论文
作者 | Wang YZ ; Wang HL ; Li SZ(李抒智) ; Zhou SM(周圣明) ; Hang Y ; Xu J(徐军) ; Ye JD ; Gu SL ; Zhang R |
刊名 | j. cryst. growth
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出版日期 | 2005 |
卷号 | 284期号:3~4页码:319 |
关键词 | annealing LiNbO3 PL XRD MOCVD ZnO thin films |
ISSN号 | 0022-0248 |
中文摘要 | zno films were grown on (0 0 0 1) linbo3 substrates by metal organic chemical vapor deposition (mocvd). annealing of zno films was performed in air for i h at 800 degrees c. the effects of annealing on the structural and optical properties of zno thin films on linbo3 substrates were investigated using x-ray diffraction (xrd), atomic force microscopy (afm) and photoluminescence (pl) measurements. xrd patterns and afm showed that the as-grown and the annealed zno films grown on linbo3 substrates had c-axis preferential orientation, the crystallinity of the zno films grown on linbo3 substrates was improved, and the grain size increased by annealing. the pl spectra showed that the intensity of the uv near-band-edge peak was increased after annealing, while the intensity of visible peak (deep-level emission) decreased. (c) 2005 elsevier b.v. all rights reserved. |
学科主题 | 光学材料;晶体 |
收录类别 | EI |
语种 | 英语 |
WOS记录号 | WOS:000233061000004 |
公开日期 | 2009-09-24 |
源URL | [http://ir.siom.ac.cn/handle/181231/5513] ![]() |
专题 | 上海光学精密机械研究所_激光与光电子功能材料研发中心 |
推荐引用方式 GB/T 7714 | Wang YZ,Wang HL,Li SZ,et al. Annealing effect on properties of ZnO thin films grown on LiNbO3 substrates by MOCVD[J]. j. cryst. growth,2005,284(3~4):319, 323. |
APA | Wang YZ.,Wang HL.,李抒智.,周圣明.,Hang Y.,...&Zhang R.(2005).Annealing effect on properties of ZnO thin films grown on LiNbO3 substrates by MOCVD.j. cryst. growth,284(3~4),319. |
MLA | Wang YZ,et al."Annealing effect on properties of ZnO thin films grown on LiNbO3 substrates by MOCVD".j. cryst. growth 284.3~4(2005):319. |
入库方式: OAI收割
来源:上海光学精密机械研究所
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