Composite substrate LiGaO2(001)/beta-Ga2O3(100) fabricated by vapor transport equilibration
文献类型：期刊论文
| 作者 | Zhang Jungang ; Xia ZT(夏长泰) ; Li SZ(李抒智) ; Xu XD(徐晓东) ; Wu Feng ; Pei GQ(裴广庆) ; Xu J(徐军) ; Zhou SM(周圣明) ; Deng Qun ; Xu Wusheng ; Shi Hongsheng |
| 刊名 | mater. lett.
 |
| 出版日期 | 2006 |
| 卷号 | 60期号:25-26页码:3073 |
| 关键词 | liGaO(2) beta-Ga2O3 vapor transport equilibration (VTE) composite substrate |
| ISSN号 | 0167-577x |
| 中文摘要 | highly (001) orientation ligao2 layers have been successfully fabricated on (100) beta-ga2o3 surface by vapor transport equilibration (vte) technique. the temperature is very important for the we treatment. at low temperature (800 degrees c), ligao(2)layers are textured. as the temperature was raised to 1100 c the layer becomes highly oriented in the [100] direction. it shows that the best temperature for we treatment is 1100 degrees c. this technique is promising to fabricate small lattice mismatch composite substrate of ligao2 (001)//beta-ga2o3 (100) for gan films. (c) 2006 elsevier b.v. all rights reserved. |
| 学科主题 | 光学材料;晶体 |
| 收录类别 | EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000240374200014 |
| 公开日期 | 2009-09-24 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/5661]  |
| 专题 | 上海光学精密机械研究所_激光与光电子功能材料研发中心 |
| 推荐引用方式 GB/T 7714 | Zhang Jungang,Xia ZT,Li SZ,et al. Composite substrate LiGaO2(001)/beta-Ga2O3(100) fabricated by vapor transport equilibration[J]. mater. lett.,2006,60(25-26):3073, 3075. |
| APA | Zhang Jungang.,夏长泰.,李抒智.,徐晓东.,Wu Feng.,...&Shi Hongsheng.(2006).Composite substrate LiGaO2(001)/beta-Ga2O3(100) fabricated by vapor transport equilibration.mater. lett.,60(25-26),3073. |
| MLA | Zhang Jungang,et al."Composite substrate LiGaO2(001)/beta-Ga2O3(100) fabricated by vapor transport equilibration".mater. lett. 60.25-26(2006):3073. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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