Two-Dimensional Stress Measurement of a Micromachined Piezoresistive Structure with Micro-Raman Spectroscopy
文献类型：期刊论文
| 作者 | Qian J(钱劲) ; Yu TX(余同希); Zhao YP(赵亚溥)
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| 刊名 | Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems
 |
| 出版日期 | 2005 |
| 卷号 | 11期号:2-3页码:97-103 |
| 通讯作者邮箱 | yzhao@lnm.imech.ac.cn |
| ISSN号 | 0946-7076 |
| 通讯作者 | Zhao, YP (reprint author), Chinese Acad Sci, State Key Lab Nonlinear Mech LNM, Inst Mech, Beijing 100080, Peoples R China. |
| 中文摘要 | This paper describes the stress characterization of a cantilever structure of a piezoresistive microflowmeter using micro-Raman spectroscopy. In order to obtain the relationship between the stress and the shift of Raman frequency, the mechanical stress in the structure was assumed to be uniaxial according to the applied loading and the boundary conditions. Also, the two-dimensional stress distribution of the structure was simulated using a finite element tool (ABAQUS v 6.2). The experimental results agree well to those predicted by the finite element simulation. It is concluded that micro-Raman spectroscopy is an accurate, non-destructive technique for measuring Microelectromechanical systems (MEMS) local stress with micrometer spatial resolution. |
| 学科主题 | 力学 |
| 类目[WOS] | Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied |
| 研究领域[WOS] | Engineering ; Science & Technology - Other Topics ; Materials Science ; Physics |
| 关键词[WOS] | MECHANICAL-STRESS ; SILICON ; PARAMETERS ; DIAMOND ; DEVICES ; GAP |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000226664900005 |
| 公开日期 | 2007-06-15 ; 2007-12-05 ; 2009-06-23 |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/15425]  |
| 专题 | 力学研究所_力学所知识产出(1956-2008) |
| 推荐引用方式 GB/T 7714 | Qian J,Yu TX,Zhao YP. Two-Dimensional Stress Measurement of a Micromachined Piezoresistive Structure with Micro-Raman Spectroscopy[J]. Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems,2005,11(2-3):97-103. |
| APA | 钱劲,余同希,&赵亚溥.(2005).Two-Dimensional Stress Measurement of a Micromachined Piezoresistive Structure with Micro-Raman Spectroscopy.Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems,11(2-3),97-103. |
| MLA | 钱劲,et al."Two-Dimensional Stress Measurement of a Micromachined Piezoresistive Structure with Micro-Raman Spectroscopy".Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems 11.2-3(2005):97-103. |
入库方式： OAI收割
来源：力学研究所
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