Analytical method of predicating the instabilities of a micro arch-shaped beam under electrostatic loading
文献类型：期刊论文
| 作者 | Zhang Y(张吟) ; Wang YS; Li ZH; Zhang Y
|
| 刊名 | Microsystem Technologies-Micro-And Nanosystems-Information Storage and Processing Systems
 |
| 出版日期 | 2010 |
| 卷号 | 16期号:6页码:909-918 |
| 通讯作者邮箱 | zhangyin@lnm.imech.ac.cn |
| ISSN号 | 0946-7076 |
| 通讯作者 | Zhang Y |
| 合作状况 | 国内 |
| 中文摘要 | An arch-shaped beam with different configurations under electrostatic loading experiences either the direct pull-in instability or the snap-through first and then the pull-in instability. When the pull-in instability occurs, the system collides with the electrode and adheres to it, which usually causes the system failure. When the snap-through instability occurs, the system experiences a discontinuous displacement to flip over without colliding with the electrode. The snap-through instability is an ideal actuation mechanism because of the following reasons: (1) after snap-through the system regains the stability and capability of withstanding further loading; (2) the system flips back when the loading is reduced, i.e. the system can be used repetitively; and (3) when approaching snap-through instability the system effective stiffness reduces toward zero, which leads to a fast flipping-over response. To differentiate these two types of instability responses for an arch-shaped beam is vital for the actuator design. For an arch-shaped beam under electrostatic loading, the nonlinear terms of the mid-plane stretching and the electrostatic loading make the analytical solution extremely difficult if not impossible and the related numerical solution is rather complex. Using the one mode expansion approximation and the truncation of the higher-order terms of the Taylor series, we present an analytical solution here. However, the one mode approximation and the truncation error of the Taylor series can cause serious error in the solution. Therefore, an error-compensating mechanism is also proposed. The analytical results are compared with both the experimental data and the numerical multi-mode analysis. The analytical method presented here offers a simple yet efficient solution approach by retaining good accuracy to analyze the instability of an arch-shaped beam under electrostatic loading. |
| 类目[WOS] | Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied |
| 研究领域[WOS] | Engineering ; Science & Technology - Other Topics ; Materials Science ; Physics |
| 关键词[WOS] | EQUIVALENT-CIRCUIT REPRESENTATION ; COMPUTER-AIDED GENERATION ; ORDER DYNAMIC MACROMODELS ; ELECTROMECHANICAL TRANSDUCERS ; PARAMETER SYSTEMS ; THIN-FILMS ; MODEL ; MICROACTUATOR ; CANTILEVER ; POLYMER |
| 收录类别 | SCI |
| 资助信息 | National Natural Science Foundation of China (NSFC) [10721202]; LNM; Foundation of National Key Laboratory of Nano/Micro Fabrication Technology |
| 原文出处 | http://www.springerlink.com/content/a623184324773636/ |
| 语种 | 英语 |
| WOS记录号 | WOS:000276975500001 |
| 公开日期 | 2011-03-01 ; 2011-03-30 |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/43519]  |
| 专题 | 力学研究所_非线性力学国家重点实验室 |
| 通讯作者 | Zhang Y |
| 推荐引用方式 GB/T 7714 | Zhang Y,Wang YS,Li ZH,et al. Analytical method of predicating the instabilities of a micro arch-shaped beam under electrostatic loading[J]. Microsystem Technologies-Micro-And Nanosystems-Information Storage and Processing Systems,2010,16(6):909-918. |
| APA | 张吟,Wang YS,Li ZH,&Zhang Y.(2010).Analytical method of predicating the instabilities of a micro arch-shaped beam under electrostatic loading.Microsystem Technologies-Micro-And Nanosystems-Information Storage and Processing Systems,16(6),909-918. |
| MLA | 张吟,et al."Analytical method of predicating the instabilities of a micro arch-shaped beam under electrostatic loading".Microsystem Technologies-Micro-And Nanosystems-Information Storage and Processing Systems 16.6(2010):909-918. |
入库方式： OAI收割
来源：力学研究所
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