A fixed arc length direct current plasma torch for reduced pressure deposition of thin films
文献类型：会议论文
| 作者 | Huang HJ(黄河激) ; Pan WX(潘文霞); Fu ZQ(付志强); Wu CK(吴承康)
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| 出版日期 | 2011-01-12 |
| 会议名称 | 10th Asia-Pacific Conference on Plasma Science and Technology |
| 会议日期 | 2010-07-04~2010-07-08 |
| 会议地点 | Jeju, Korea |
| 通讯作者邮箱 | huang@imech.ac.cn |
| 关键词 | fixed-length dc plasma reduced pressure deposition thermal plasma |
| 通讯作者 | 黄河激 |
| 中文摘要 | Because of its high energy density direct current(dc)thermal plasmas are widely accepted as a processing medium which facilitates high processing rates high fluxes of radical species the potential for smaller jnstallations a wide choice of reactants and high quench rates[1].A broad range of industrial processing methods have been developed based on dc plasma technology. However,nonstationary features limited new applications of dc plasma in advanced processing, where reliability£¬reproducibility and precise controllability are required£. These challenges call for better understanding of the arc and jet behavior over a wide range of generating parameters and a comprehensive control of every aspect of lhe plasma processing. |
| 收录类别 | 其他 |
| 合作状况 | 国际 |
| 会议录 | 10th Asia-Pacific Conference on Plasma Science and Technology.Jeju, Korea.2010-07-04~2010-07-08.
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| 学科主题 | 电磁流体力学和等离子体动力学;; |
| 语种 | 英语 |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/43291]  |
| 专题 | 力学研究所_等离子体与燃烧中心(2009-2011) |
| 推荐引用方式 GB/T 7714 | Huang HJ,Pan WX,Fu ZQ,et al. A fixed arc length direct current plasma torch for reduced pressure deposition of thin films[C]. 见:10th Asia-Pacific Conference on Plasma Science and Technology. Jeju, Korea. 2010-07-04~2010-07-08. |
入库方式： OAI收割
来源：力学研究所
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