中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
LiGaO_2衬底上ZnO外延膜的结构与光学特性

文献类型:期刊论文

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作者黄涛华 ; 周圣明 ; 滕浩 ; 林辉 ; 王军
刊名光学学报
出版日期2008
卷号28期号:7页码:1420
关键词薄膜光学 LiGaO2 半导体材料 Magnetron sputtering ZnO薄膜 Semiconductor material 磁控溅射 Thin film otpics LiGaO2 ZnO films 光致发光谱
ISSN号0253-2239
其他题名Structural and optical characteristics of ZnO films on LiGaO2 substrate
中文摘要采用磁控溅射法在(001)、(100)及(010)LiGaO2衬底上制备了ZnO薄膜,通过X射线衍射(XRD)、原子力显微镜(AFM)、透过光谱以及光致发光谱(PL)对薄膜的结构、形貌及光学性质进行了表征。结果表明LiGaO2衬底不同晶面上制备的ZnO薄膜具有不同的择优取向,在(001)(、100)及(010)LiGaO2上分别获得了[0001][、1100]及[1120]取向的ZnO薄膜;不同取向的ZnO薄膜表面形貌差异较大;薄膜在可见光波段具有较高的透过率;在ZnO薄膜的光致发光谱中只观察到了位于378 nm的紫外发射峰,而深能级发射几乎观察不到,(1100)取向的薄膜紫外发射峰强度最大,半高宽也最小,薄膜光致发光性质的差异主要和晶粒尺寸有关。; ZnO films were fabricated on LiGaO2 (001), (100) and (010) planes by magnetron sputtering. The structural, morphological and optical properties of as-grown ZnO films were investigated by X-ray diffraction (XRD), atomic force microscopy (AFM), transmission spectra and photoluminescence (PL) spectra. The results show that ZnO films on various planes of LiGaO2 have different preferred orientations. [0001], [11¯00] and [112¯0] oriented ZnO films are obtained on LiGaO2 (001), (100) and (010) planes, respectively. The ZnO films show different surface morphologies and high transmittance in visible spectrum range. Only UV emission peaks located at 378 nm are observed in PL spectra of ZnO films. The (11¯00) ZnO film shows the highest UV emission intensity with the smallest full width at half maximum (FWHM) value. The difference in PL properties of the ZnO films is mainly due to different grain sizes.
学科主题光学材料;晶体
收录类别EI
语种中文
公开日期2009-09-24
源URL[http://ir.siom.ac.cn/handle/181231/6069]  
专题上海光学精密机械研究所_激光与光电子功能材料研发中心
推荐引用方式
GB/T 7714
黄涛华,周圣明,滕浩,等. LiGaO_2衬底上ZnO外延膜的结构与光学特性, Structural and optical characteristics of ZnO films on LiGaO2 substrate[J]. 光学学报,2008,28(7):1420, 1424.
APA 黄涛华,周圣明,滕浩,林辉,&王军.(2008).LiGaO_2衬底上ZnO外延膜的结构与光学特性.光学学报,28(7),1420.
MLA 黄涛华,et al."LiGaO_2衬底上ZnO外延膜的结构与光学特性".光学学报 28.7(2008):1420.

入库方式: OAI收割

来源:上海光学精密机械研究所

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