Low temperature growth of c-axis oriented AlN films on gamma-LiAlO2 by radio frequency magnetron sputtering
文献类型：期刊论文
| 作者 | Teng Hao ; Zhou SM(周圣明) ; Lin Hui ; Huang Taohua ; Han Ping ; Zhang Rong |
| 刊名 | j. alloy. compd.
 |
| 出版日期 | 2009 |
| 卷号 | 469期号:1-2页码:219 |
| 关键词 | Aluminum nitride Magnetron sputtering gamma-LiAlO2 substrate XRD AFM |
| ISSN号 | 0925-8388 |
| 中文摘要 | aluminum nitride (aln) films were prepared on gamma-lialo2 substrates by radio frequency (rf) magnetron sputtering. the influence of substrate temperature (t-s) and nitrogen (n-2) concentration on film growth was investigated. the x-ray diffraction (xrd) results reveal that highly c-axis oriented aln films can be obtained in the temperature range from room temperature (rt) to 300 degrees c. a smoother surface and a crystalline quality decrease with increasing n-2 concentration have been observed by xrd and atomic force microscopy (afm) for the films deposited at lower substrate temperature. on the contrary, the degradation of the surface smoothness and the higher crystalline quality can be observed for the films deposited at a higher substrate temperature with n-2-rich ambient. the growth mechanism which leads to different crystalline quality of the films is discussed. (c) 2008 elsevier b.v. all rights reserved. |
| 资助信息 | national natural science foundation of china [60676004]; shanghai science program [06dz11402]; project of high technology research and development of china [2006aa03a101, 2006aa03a103] |
| 语种 | 英语 |
| WOS记录号 | WOS:000263801500039 |
| 公开日期 | 2009-09-24 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/6201]  |
| 专题 | 上海光学精密机械研究所_激光与光电子功能材料研发中心 |
| 推荐引用方式 GB/T 7714 | Teng Hao,Zhou SM,Lin Hui,et al. Low temperature growth of c-axis oriented AlN films on gamma-LiAlO2 by radio frequency magnetron sputtering[J]. j. alloy. compd.,2009,469(1-2):219, 223. |
| APA | Teng Hao,周圣明,Lin Hui,Huang Taohua,Han Ping,&Zhang Rong.(2009).Low temperature growth of c-axis oriented AlN films on gamma-LiAlO2 by radio frequency magnetron sputtering.j. alloy. compd.,469(1-2),219. |
| MLA | Teng Hao,et al."Low temperature growth of c-axis oriented AlN films on gamma-LiAlO2 by radio frequency magnetron sputtering".j. alloy. compd. 469.1-2(2009):219. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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