Low temperature growth of c-axis oriented AlN films on γ-LiAlO2 by radio frequency magnetron sputtering
文献类型：期刊论文
| 作者 | Hao Teng ; Shengming Zhou ; Hui Lin ; Taohua Huang ; Ping Han ; Rong Zhang |
| 刊名 | Journal of Alloys and Compounds
 |
| 出版日期 | 2009 |
| 期号 | 469 |
| 合作状况 | 其它 |
| 学科主题 | 其他 |
| 收录类别 | 其他 |
| 语种 | 中文 |
| 公开日期 | 2010-05-14 ; 2010-10-12 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/6845]  |
| 专题 | 上海光学精密机械研究所_激光与光电子功能材料研发中心 |
| 推荐引用方式 GB/T 7714 | Hao Teng,Shengming Zhou,Hui Lin,et al. Low temperature growth of c-axis oriented AlN films on γ-LiAlO2 by radio frequency magnetron sputtering[J]. Journal of Alloys and Compounds,2009(469). |
| APA | Hao Teng,Shengming Zhou,Hui Lin,Taohua Huang,Ping Han,&Rong Zhang.(2009).Low temperature growth of c-axis oriented AlN films on γ-LiAlO2 by radio frequency magnetron sputtering.Journal of Alloys and Compounds(469). |
| MLA | Hao Teng,et al."Low temperature growth of c-axis oriented AlN films on γ-LiAlO2 by radio frequency magnetron sputtering".Journal of Alloys and Compounds .469(2009). |
入库方式： OAI收割
来源：上海光学精密机械研究所
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