Study of thin-film SO2 gas sensors by photometric and ellipsometric methods
文献类型：期刊论文
| 作者 | Tang ZS ; Fan ZX(范正修) ; Shao JD(邵建达) |
| 刊名 | opt. eng.
 |
| 出版日期 | 2001 |
| 卷号 | 40期号:5页码:856 |
| 关键词 | optical sensitivity gas sensor thin film SO2 |
| ISSN号 | 0091-3286 |
| 中文摘要 | pt-, pd-, and zr-doped sno2 thin films and dopant-free vox films were fabricated by planar magnetron sputtering. tests for sensitivity to so2 for all samples were conducted at 180 degreesc, and the sensitivities were investigated ex situ with photometric and ellipsometric methods at room temperature. it was found that the optical sensitivities as well as the sensitive wavelength region for sno2 films could be tuned by doping. the pd-doped sno2 films had good sensitivity in the visible range, and the zr-doped in the near ir. the dominant sensitive wavelength region for vox films fell into the visible range, and the ratio of the sensitivity in the visible to that in the near ir increased with o-2/ar in the depositing atmosphere. (c) 2001 society of photo-optical instrumentation engineers . |
| 学科主题 | 光学薄膜 |
| 语种 | 英语 |
| WOS记录号 | WOS:000168946000032 |
| 公开日期 | 2009-09-22 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/4100]  |
| 专题 | 上海光学精密机械研究所_光学薄膜技术研究与发展中心 |
| 推荐引用方式 GB/T 7714 | Tang ZS,Fan ZX,Shao JD. Study of thin-film SO2 gas sensors by photometric and ellipsometric methods[J]. opt. eng.,2001,40(5):856, 860. |
| APA | Tang ZS,范正修,&邵建达.(2001).Study of thin-film SO2 gas sensors by photometric and ellipsometric methods.opt. eng.,40(5),856. |
| MLA | Tang ZS,et al."Study of thin-film SO2 gas sensors by photometric and ellipsometric methods".opt. eng. 40.5(2001):856. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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