Laser conditioning and multi-shot laser damage accumulation effects of HfO2/SiO2 antireflective coatings
文献类型:期刊论文
作者 | Zhao YN ; Wang T ; Zhang DW ; Shao JD(邵建达) ; Fan ZX(范正修) |
刊名 | appl. surf. sci.
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出版日期 | 2005 |
卷号 | 245期号:1~4页码:335 |
关键词 | antireflective coatings laser conditioning single-shot multi-shot laser-induced damage threshold accumulation effects defect damage morphology |
ISSN号 | 0169-4332 |
中文摘要 | laser conditioning effects of the hfo2/sio2 antireflective (ar) coatings at 1064 nm and the accumulation effects of multishot laser radiation were investigated. the hfo2/sio2 ar coatings were prepared by e-beam evaporation (ebe). the singleshot and multi-shot laser induced damage threshold was detected following iso standard 11254-1.2, and the laser conditioning was conducted by three-step raster scanning method. it was found that the single-shot lidt and multi-shot lidt was almost the same. the damage mostly > 80% occurred in the first shot under multi-shot laser radiation, and after that the damage occurring probability plummeted to < 5%. there was no obvious enhancement of the laser damage resistance for both the single-shot and multi-shot laser radiation of the ar coatings after laser conditioning. a nomarski microscope was employed to map the damage morphology, and it found that the damage behavior is defect-initiated for both unconditioned and conditioned samples. © 2004 elsevier b.v. all rights reserved. |
学科主题 | 光学薄膜 |
收录类别 | EI |
语种 | 英语 |
WOS记录号 | WOS:000228904900045 |
公开日期 | 2009-09-22 |
源URL | [http://ir.siom.ac.cn/handle/181231/4124] ![]() |
专题 | 上海光学精密机械研究所_光学薄膜技术研究与发展中心 |
推荐引用方式 GB/T 7714 | Zhao YN,Wang T,Zhang DW,et al. Laser conditioning and multi-shot laser damage accumulation effects of HfO2/SiO2 antireflective coatings[J]. appl. surf. sci.,2005,245(1~4):335, 339. |
APA | Zhao YN,Wang T,Zhang DW,邵建达,&范正修.(2005).Laser conditioning and multi-shot laser damage accumulation effects of HfO2/SiO2 antireflective coatings.appl. surf. sci.,245(1~4),335. |
MLA | Zhao YN,et al."Laser conditioning and multi-shot laser damage accumulation effects of HfO2/SiO2 antireflective coatings".appl. surf. sci. 245.1~4(2005):335. |
入库方式: OAI收割
来源:上海光学精密机械研究所
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