Laser-induced damage threshold of ZrO2 thin films prepared at different oxygen partial pressures by electron-beam evaporation
文献类型：期刊论文
| 作者 | Zhang DP ; Shao JA ; Zhao YN ; Fan SH ; Hong RJ(洪瑞金) ; Fan ZX(范正修) |
| 刊名 | j. vac. sci. technol. a
 |
| 出版日期 | 2005 |
| 卷号 | 23期号:1页码:197 |
| 关键词 | ION-ASSISTED DEPOSITION COATINGS MICROSTRUCTURE DEPENDENCE |
| ISSN号 | 0734-2101 |
| 中文摘要 | zro2, films were deposited by electron-beam evaporation with the oxygen partial pressure varying from 3 x 10(-3) pa to i i x 10(-3) pa. the phase structure of the samples was characterized by x-ray diffraction (xrd). the thermal absorption of the films was measured by the surface thermal lensing technique. a spectrophotometer was employed to measure the refractive indices of the samples. the laser-induced damage threshold (lidt) was assessed using a 1064, nm nd: yttritium-aluminium-garnet pulsed laser at pulse width of 12 ns. the influence of oxygen partial pressure on the microstructure and lidt of zro2 films was investigated. xrd data revealed that the films changed from polycrystalline to amorphous as the oxygen partial pressure increased. the variation of refractive index at 550 nm wavelength indicated that the packing density of the films decreased gradually with increasing oxygen partial pressure. the absorptance of the samples decreased monotonically from 125.2 to 84.5 ppm with increasing oxygen partial pressure. the damage threshold, values increased from 18.5 to 26.7 j/cm(2) for oxygen partial pressures varying from 3 x 10(-3) pa to 9 x 10(-3) pa, but decreased to 17.3 j/cm(2) in the case of i i x 10(-3) pa. (c) 2005 american vacuum society. |
| 学科主题 | 光学薄膜 |
| 收录类别 | EI |
| 语种 | 英语 |
| 公开日期 | 2009-09-22 ; 2010-10-12 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/4152]  |
| 专题 | 上海光学精密机械研究所_光学薄膜技术研究与发展中心 |
| 推荐引用方式 GB/T 7714 | Zhang DP,Shao JA,Zhao YN,et al. Laser-induced damage threshold of ZrO2 thin films prepared at different oxygen partial pressures by electron-beam evaporation[J]. j. vac. sci. technol. a,2005,23(1):197, 200. |
| APA | Zhang DP,Shao JA,Zhao YN,Fan SH,洪瑞金,&范正修.(2005).Laser-induced damage threshold of ZrO2 thin films prepared at different oxygen partial pressures by electron-beam evaporation.j. vac. sci. technol. a,23(1),197. |
| MLA | Zhang DP,et al."Laser-induced damage threshold of ZrO2 thin films prepared at different oxygen partial pressures by electron-beam evaporation".j. vac. sci. technol. a 23.1(2005):197. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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