应用离子后处理技术提高薄膜激光损伤阈值
文献类型：期刊论文
| 作者 | 张东平 ; 张大伟 ; 范树海 ; 黄建兵 ; 赵元安 ; 邵建达 ; 范正修 |
| 刊名 | 强激光与粒子束
 |
| 出版日期 | 2005 |
| 卷号 | 17期号:2页码:213 |
| 关键词 | 激光损伤阈值 薄膜 离子后处理 微缺陷 Laser-induced damage threshold Film Ion post-treatment Micro-defect |
| ISSN号 | 1001-4322 |
| 其他题名 | Using ion post-treatment technique to improve laser-induced damage threshold of thin films |
| 中文摘要 | 利用电子束热蒸发方法在K9玻璃基底上沉积氧化锆薄膜,并对其中一些样品用低能O2^+进行了后处理.采用表面热透镜技术测量薄膜样品表面弱吸收,采用显微镜观察样品离子后处理前后的显微缺陷密度.测试结果表明:经离子后处理样品表面的缺陷密度从18.6/mm^2降低到6.2/mm^2,且其激光损伤阈值从15.9 J/cm^2提高到23.1 J/cm^2,样品的平均吸收率从处理前的1.147×10^-4降低到处理后的9.56×10^-5.通过对处理前后样品的表面微缺陷密度、吸收率及损伤形貌等的分析发现:离子后处理可以降; ZrO2 thin films were deposited on K9 glass substrates by e-beam evaporation method and some samples were treated with low energy O~+1 after deposition. Surface weak absorption was measured using surface thermal lens technique, and micro-defect density was measured using optical microscope. The experimental results indicate that the absorption of the samples decreases from 1.147×10~(-4) to 9.56×10~(-5) after post-treatment, and the micro-defect density reduces from 18.6/mm~2 to 6.2/mm~2 compared with the un-treated samples. Anti-laser-irradiation test indicates that the laser-induced damage threshold are improved from 15.9 J/cm~2 to 23.1 J/cm~2 comparing the ion-post treatment samples with the untreated samples. By analysis of the defect density, weak absorption, and damage morphologies of the samples, it is found that the reduction of the micro-defect and sub-micro-defect density after ion treatment, so the reduction of the average absorption, and the enhancing of the adhesion of films and substrates are the main reasons that the laser -induced damage shreshold of the films increase. |
| 学科主题 | 光学薄膜 |
| 分类号 | O484.4 |
| 收录类别 | ei |
| 语种 | 中文 |
| 公开日期 | 2009-09-22 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/4160]  |
| 专题 | 上海光学精密机械研究所_光学薄膜技术研究与发展中心 |
| 推荐引用方式 GB/T 7714 | 张东平,张大伟,范树海,等. 应用离子后处理技术提高薄膜激光损伤阈值[J]. 强激光与粒子束,2005,17(2):213, 216. |
| APA | 张东平.,张大伟.,范树海.,黄建兵.,赵元安.,...&范正修.(2005).应用离子后处理技术提高薄膜激光损伤阈值.强激光与粒子束,17(2),213. |
| MLA | 张东平,et al."应用离子后处理技术提高薄膜激光损伤阈值".强激光与粒子束 17.2(2005):213. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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