Structure and optical properties of ZnS thin films grown by glancing angle deposition
文献类型：期刊论文
| 作者 | Wang Sumei ; Fu Xiaoyong ; Xia Guodong ; Wang Jianguo ; Shao JD(邵建达) ; Fan ZX(范正修) |
| 刊名 | appl. surf. sci.
 |
| 出版日期 | 2006 |
| 卷号 | 252期号:24页码:8734 |
| 关键词 | glancing angle deposition microstructure anisotropy birefringence |
| ISSN号 | 0169-4332 |
| 中文摘要 | the glancing angle deposition (glad) technique was used to deposit zns films by electron beam evaporation method. the cross sectional scanning electron microscopy (sem) image illustrated a highly orientated microstructure composed of slanted column. the atomic force microscopy (apm) analysis indicated that incident flux angle had significant effects on the nodule size and surface roughness. under identical nominal thickness, the actual thickness of the glad films is related to the incident flux angle. the refractive index and in-plane birefringence of the glad zns films were discussed, and the maximum bireffingence delta n = 0.036 was obtained at incident flux angle of alpha = 80 degrees. therefore, the glancing angle deposition technique is a promising way to create a columnar structure with enhanced birefringent property. (c) 2005 elsevier b.v. all rights reserved. |
| 学科主题 | 光学薄膜 |
| 收录类别 | EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000241888000061 |
| 公开日期 | 2009-09-22 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/4268]  |
| 专题 | 上海光学精密机械研究所_光学薄膜技术研究与发展中心 |
| 推荐引用方式 GB/T 7714 | Wang Sumei,Fu Xiaoyong,Xia Guodong,et al. Structure and optical properties of ZnS thin films grown by glancing angle deposition[J]. appl. surf. sci.,2006,252(24):8734, 8737. |
| APA | Wang Sumei,Fu Xiaoyong,Xia Guodong,Wang Jianguo,邵建达,&范正修.(2006).Structure and optical properties of ZnS thin films grown by glancing angle deposition.appl. surf. sci.,252(24),8734. |
| MLA | Wang Sumei,et al."Structure and optical properties of ZnS thin films grown by glancing angle deposition".appl. surf. sci. 252.24(2006):8734. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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