Structural and optical properties of nanostructured TiO2 thin films fabricated by glancing angle deposition
文献类型：期刊论文
| 作者 | Wang Sumei ; Xia Guodong ; He HB(贺洪波) ; Yi Kui ; Shao JD(邵建达) ; Fan ZX(范正修) |
| 刊名 | j. alloy. compd.
 |
| 出版日期 | 2007 |
| 卷号 | 431期号:1-2页码:287 |
| 关键词 | thin films vapor deposition microstructure optical properties scanning electron microscopy |
| ISSN号 | 0925-8388 |
| 中文摘要 | tio2 films deposited by electron beam evaporation with glancing angle deposition (glad) technique were reported. the influence of flux angle on the surface morphology and the microstructure was investigated by scanning electron microscopy. the glad tio2 films are anisotropy with highly orientated nanostructure of the slanted columns. with the increase of flux angle, refractive index and packing density decrease. this is caused by the shadowing effect dominating film growth. the anisotropic structure of tio2 films results in optical birefringence, which reaches its maximum at the flux angle alpha = 65 degrees. the maximum birefringence of glad tio2 films is higher than that of common bulk materials. it is suggested that glancing angle deposition may offer an effective method to obtain tailorable refractive index and birefringence in a large continuous range. (c) 2006 elsevier b.v. all rights reserved. |
| 学科主题 | 光学薄膜 |
| 收录类别 | EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000245498300054 |
| 公开日期 | 2009-09-22 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/4522]  |
| 专题 | 上海光学精密机械研究所_光学薄膜技术研究与发展中心 |
| 推荐引用方式 GB/T 7714 | Wang Sumei,Xia Guodong,He HB,et al. Structural and optical properties of nanostructured TiO2 thin films fabricated by glancing angle deposition[J]. j. alloy. compd.,2007,431(1-2):287, 291. |
| APA | Wang Sumei,Xia Guodong,贺洪波,Yi Kui,邵建达,&范正修.(2007).Structural and optical properties of nanostructured TiO2 thin films fabricated by glancing angle deposition.j. alloy. compd.,431(1-2),287. |
| MLA | Wang Sumei,et al."Structural and optical properties of nanostructured TiO2 thin films fabricated by glancing angle deposition".j. alloy. compd. 431.1-2(2007):287. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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