Characteristics of high reflection mirror with an SiO2 top layer for multilayer dielectric grating
文献类型：期刊论文
| 作者 | Liu SJ(刘世杰) ; Jin Yunxia ; Cui Yun ; Ma JY(麻健勇) ; Shao JD(邵建达) ; Fan ZX(范正修) |
| 刊名 | j. phys. d-appl. phys.
 |
| 出版日期 | 2007 |
| 卷号 | 40期号:10页码:3224 |
| 关键词 | Dielectric materials Diffraction gratings Electromagnetic wave diffraction Light reflection Multilayers Pulse compression Silica |
| ISSN号 | 0022-3727 |
| 中文摘要 | the high reflection (hr) mirror composed of dielectric stacks with excellent spectrum characteristics and high damage resistant ability is critical for fabricating multilayer dielectric (mld) grating for pulse compressor. the selection of the sio2 material as the top layer of the hr mirror for grating fabrication is beneficial for improving the laser-induced damage threshold of mld grating as well as minimizing the standing-wave effect in the photoresist during the exposure process. based on an (hll) h-9 design comprising quarter-waves of hfo2 ( h) and half-waves of sio2 ( l), we obtain an optimal design of the hr mirror for mld grating, the sio2 top layer of which is optimized with a merit function including both the diffraction efficiency of the mld grating and the electric field enhancement in the grating. dependence of the performance of the mld grating on the fabrication error of the dielectric mirror is analysed in detail. the hr mirror is also fabricated by e-beam evaporation, which shows good spectral characteristics at the exposure wavelength of 413 nm and at the operation wavelength of 1053 nm and an average damage threshold of 10 j cm(-2) for a 12 ns pulse. |
| 学科主题 | 光学薄膜 |
| 收录类别 | EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000246577200032 |
| 公开日期 | 2009-09-22 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/4528]  |
| 专题 | 上海光学精密机械研究所_光学薄膜技术研究与发展中心 |
| 推荐引用方式 GB/T 7714 | Liu SJ,Jin Yunxia,Cui Yun,et al. Characteristics of high reflection mirror with an SiO2 top layer for multilayer dielectric grating[J]. j. phys. d-appl. phys.,2007,40(10):3224, 3228. |
| APA | 刘世杰,Jin Yunxia,Cui Yun,麻健勇,邵建达,&范正修.(2007).Characteristics of high reflection mirror with an SiO2 top layer for multilayer dielectric grating.j. phys. d-appl. phys.,40(10),3224. |
| MLA | 刘世杰,et al."Characteristics of high reflection mirror with an SiO2 top layer for multilayer dielectric grating".j. phys. d-appl. phys. 40.10(2007):3224. |
入库方式： OAI收割
来源：上海光学精密机械研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。