Influence of deposition conditions on the microstructure of oxides thin films
文献类型：期刊论文
| 作者 | Tian Guanglei ; Wu Shigang ; Shu Kangying ; Qin Laishun ; Shao JD(邵建达) |
| 刊名 | appl. surf. sci.
 |
| 出版日期 | 2007 |
| 卷号 | 253期号:21页码:8782 |
| 关键词 | X-ray diffraction crystal structure nucleation oxides films |
| ISSN号 | 0169-4332 |
| 中文摘要 | thin films of zro2, hfo2 and tio2 were deposited on kinds of substrates by electron beam evaporation (eb), ion assisted deposition (iad) and dual ion beam sputtering (dibs). then some of them were annealed at different temperatures. x-ray diffraction (xrd) was applied to determine the crystalline phase and the grain size of these films, and the results revealed that their microstructures strongly depended on the deposition conditions such as substrate, deposition temperature, deposition method and annealing temperature. theory of crystal growth and migratory diffusion were applied to explain the difference of crystalline structures between these thin films deposited and treated under various conditions. (c) 2007 elsevier b.v. all rights reserved. |
| 学科主题 | 光学薄膜 |
| 收录类别 | EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000249248100036 |
| 公开日期 | 2009-09-22 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/4546]  |
| 专题 | 上海光学精密机械研究所_光学薄膜技术研究与发展中心 |
| 推荐引用方式 GB/T 7714 | Tian Guanglei,Wu Shigang,Shu Kangying,et al. Influence of deposition conditions on the microstructure of oxides thin films[J]. appl. surf. sci.,2007,253(21):8782, 8787. |
| APA | Tian Guanglei,Wu Shigang,Shu Kangying,Qin Laishun,&邵建达.(2007).Influence of deposition conditions on the microstructure of oxides thin films.appl. surf. sci.,253(21),8782. |
| MLA | Tian Guanglei,et al."Influence of deposition conditions on the microstructure of oxides thin films".appl. surf. sci. 253.21(2007):8782. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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