Preparation and characterization of nanostructured ZrO2 thin films by glancing angle deposition
文献类型：期刊论文
| 作者 | Wang Sumei ; Xia Guodong ; Fu Xiaoyong ; He HB(贺洪波) ; Shao JD(邵建达) ; Fan ZX(范正修) |
| 刊名 | thin solid films
 |
| 出版日期 | 2007 |
| 卷号 | 515页码:3352 |
| 关键词 | glancing angle deposition ZrO2 films structure birefringence |
| ISSN号 | 0040-6090 |
| 中文摘要 | zro2 films were prepared by electron beam evaporation with glancing angle deposition (glad) technique. the as-deposition and annealed zro2 films are all amorphous, different from that deposited at normal incidence. due to the shadowing effect, a highly orientated structure composed of slanted columns formed, and the obtained films became the mixture of slanted columns and voids. the relationship among the effective refractive index, packing density and flux incident angle was investigated. the refractive index and packing density of zro2 films decrease with the increase of the incident angle. the in-plane birefringence of glad zro2 films was calculated. at the packing density of 0.576, the maximum birefringence is 0.037. (c) 2006 elsevier b.v. all rights reserved. |
| 学科主题 | 光学薄膜 |
| 收录类别 | EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000244825100008 |
| 公开日期 | 2009-09-22 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/4552]  |
| 专题 | 上海光学精密机械研究所_光学薄膜技术研究与发展中心 |
| 推荐引用方式 GB/T 7714 | Wang Sumei,Xia Guodong,Fu Xiaoyong,et al. Preparation and characterization of nanostructured ZrO2 thin films by glancing angle deposition[J]. thin solid films,2007,515:3352, 3355. |
| APA | Wang Sumei,Xia Guodong,Fu Xiaoyong,贺洪波,邵建达,&范正修.(2007).Preparation and characterization of nanostructured ZrO2 thin films by glancing angle deposition.thin solid films,515,3352. |
| MLA | Wang Sumei,et al."Preparation and characterization of nanostructured ZrO2 thin films by glancing angle deposition".thin solid films 515(2007):3352. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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