Thickness dependence of structure and optical properties of silver films deposited by magnetron sputtering
文献类型：期刊论文
| 作者 | Sun Xilian ; Hong RJ(洪瑞金) ; Hou Haihong ; Fan ZX(范正修) ; Shao JD(邵建达) |
| 刊名 | thin solid films
 |
| 出版日期 | 2007 |
| 卷号 | 515期号:17页码:6962 |
| 关键词 | silver sputtering thickness optical properties nanostructures |
| ISSN号 | 0040-6090 |
| 中文摘要 | a series of silver films with different thickness were prepared under identical conditions by direct current magnetron sputtering. the optical properties of the silver films were measured using spectrophotometric techniques and the optical constants were calculated from reflection and transmission measurements made at near normal incidence. the results show that the optical properties and constants are affected by films' thickness. below the critical thickness of 17 nm at which ag film forms a continuous film, the optical properties and constants vary significantly as the thickness of films increases and then tends to a stable value which is reached at 41 nm. x-ray diffraction measurements were carried out to examine the structure and stress evolution of the ag films as a function of films' thickness. it was found that the interplanar distance of (111) orientation decreases when the film thickness increases and tends to be close to that of bulk material. the compressive strains also decrease with increasing thickness. (c) 2007 published by elsevier b.v. |
| 学科主题 | 光学薄膜 |
| 收录类别 | EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000246947800049 |
| 公开日期 | 2009-09-22 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/4554]  |
| 专题 | 上海光学精密机械研究所_光学薄膜技术研究与发展中心 |
| 推荐引用方式 GB/T 7714 | Sun Xilian,Hong RJ,Hou Haihong,et al. Thickness dependence of structure and optical properties of silver films deposited by magnetron sputtering[J]. thin solid films,2007,515(17):6962, 6966. |
| APA | Sun Xilian,洪瑞金,Hou Haihong,范正修,&邵建达.(2007).Thickness dependence of structure and optical properties of silver films deposited by magnetron sputtering.thin solid films,515(17),6962. |
| MLA | Sun Xilian,et al."Thickness dependence of structure and optical properties of silver films deposited by magnetron sputtering".thin solid films 515.17(2007):6962. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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