Optical and electrical properties of TiOx thin films deposited by electron beam evaporation
文献类型：期刊论文
| 作者 | Yao JK(姚建可) ; Shao JD(邵建达) ; He HB(贺洪波) ; Fan ZX(范正修) |
| 刊名 | vacuum
 |
| 出版日期 | 2007 |
| 卷号 | 81期号:9页码:1023 |
| 关键词 | titanium monoxide electron beam evaporation Tio(x) thin film X-ray photoelectron spectroscopy |
| ISSN号 | 0042-207x |
| 中文摘要 | the tiox thin films were prepared by electron beam evaporation using tio as the starting material. the effect of the annealing temperature on the optical and electrical properties was investigated. the spectra of x-ray photoelectron spectroscopy reveal that ti in the films mainly exist in the forms of ti2+ and ti3+ below 400 degrees c 24h annealing. the charge transfer between different titanium ion contribute greatly to the color, absorption, and electrical resistance of the films. (c) 2006 elsevier ltd. all rights reserved. |
| 学科主题 | 光学薄膜 |
| 收录类别 | EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000247510200001 |
| 公开日期 | 2009-09-22 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/4556]  |
| 专题 | 上海光学精密机械研究所_光学薄膜技术研究与发展中心 |
| 推荐引用方式 GB/T 7714 | Yao JK,Shao JD,He HB,et al. Optical and electrical properties of TiOx thin films deposited by electron beam evaporation[J]. vacuum,2007,81(9):1023, 1028. |
| APA | 姚建可,邵建达,贺洪波,&范正修.(2007).Optical and electrical properties of TiOx thin films deposited by electron beam evaporation.vacuum,81(9),1023. |
| MLA | 姚建可,et al."Optical and electrical properties of TiOx thin films deposited by electron beam evaporation".vacuum 81.9(2007):1023. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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