中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
8.0nm反射式偏振膜的设计和制备

文献类型:期刊论文

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作者吕超 ; 易葵 ; 邵建达
刊名光子学报
出版日期2007
卷号36期号:11页码:2049
关键词多层膜 Multilayer 软X射线 Soft X-ray 偏振 Polarization 准布儒斯特角 Bruster angle
ISSN号1004-4213
其他题名Designing and Fabrication of Multilayer Polarization for Soft X-ray at 8.0 nm
中文摘要讨论了软X射线反射式偏振膜的设计原理和方法,利用设计软件模拟设计了8.0nm处的Mo/B4C偏振膜.对影响多层膜性能的参量进行了详细的误差分析.利用磁控溅射镀膜机进行了偏振膜的制备研究,X射线小角衍射测量了多层膜的周期厚度,测量数据的拟合结果与设计值吻合很好.; The design principle and method of multilayer polarizing elements for soft x-ray region was discussed. The Mo/B4C multilayer was designed by 8 nm designing software. Parameter of the multilayer structure was studied and the impact of their misnomer on the multilayer polarizing elements was analyzed.Mo/B4C multilayer was fabricated by magnetron sputtering and proved that it has perfect periodic structure through small angle XRD research. The period of the multilayer is 5.76 nm and it is quite near to our dev...
学科主题光学薄膜
收录类别EI
语种中文
公开日期2009-09-22
源URL[http://ir.siom.ac.cn/handle/181231/4580]  
专题上海光学精密机械研究所_光学薄膜技术研究与发展中心
推荐引用方式
GB/T 7714
吕超,易葵,邵建达. 8.0nm反射式偏振膜的设计和制备, Designing and Fabrication of Multilayer Polarization for Soft X-ray at 8.0 nm[J]. 光子学报,2007,36(11):2049.
APA 吕超,易葵,&邵建达.(2007).8.0nm反射式偏振膜的设计和制备.光子学报,36(11),2049.
MLA 吕超,et al."8.0nm反射式偏振膜的设计和制备".光子学报 36.11(2007):2049.

入库方式: OAI收割

来源:上海光学精密机械研究所

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