Al2O3和Cr过渡层对Ag膜光学性质及其附着力的影响
文献类型:期刊论文
作者 | 孙喜莲 ; 范正修 ; 邵建达 |
刊名 | 金属学报 |
出版日期 | 2007 |
卷号 | 43期号:3页码:163 |
ISSN号 | 0412-1961 |
关键词 | Ag膜 Al2O3过渡层 Cr过渡层 光学性质 附着力 Ag film Al2O3 interlayer Cr interlayer optical property adhesion |
其他题名 | Effects of Al2O3 and Cr interlayers on the optical property and adhesion of Ag film |
中文摘要 | 研究了在玻璃基底上镀制Al2O3和Cr过渡层对Ag膜反射率及附着力的影响.分光光度计测试了Ag膜的反射率,结果表明,与Cr过渡层相比,Al2O3过渡层对Ag膜反射率的降低相对较小;而且,随着Al2O3厚度的增加,Ag膜的反射率先增大后减小.XRD与AES测试表明,引入Al2O3或Cr可明显细化Ag晶粒,减弱Ag膜(111)织构;Al2O3作过渡层时,Al原子向Ag层中扩散显著;而Cr作过渡层时,只有少量Cr原子扩散进入Ag层.因此,Al2O3作过渡层能显著增强薄膜与玻璃基体之间的附着力.; Properties of Ag film deposited on BK7 glass substrate with Al2O3 and Cr intermediate layers were investigated by using spectrophotometer, XRD, AES and adhesion test. The results showed that the effect of Al2\O3 interlayer on the reflectivity of Ag film is smaller compared with Cr interlayer. And with increasing Al2O3 interlayer thickness, the reflectivity of Ag film increased firstly and then decreased. On the other hand, introducing Al2O3 and Cr interlayers, the Ag grains are refined and the (111) texture of Ag film are weakened due to the diffusion of aluminum and Cr atoms to the growth face, thus resulting in the decrease of reflectivity of Ag film. Grain refining could improve the virtual contacting area between Ag film and substrate during depositing initiation. Alumina interlayer enhanced the adhesion between Ag film and glass substrate, which attributed to more Al atoms diffusing to the Ag film than Cr atoms. |
学科主题 | 光学薄膜 |
分类号 | O484.4 |
收录类别 | eI |
语种 | 中文 |
公开日期 | 2009-09-22 |
源URL | [http://ir.siom.ac.cn/handle/181231/4586] |
专题 | 上海光学精密机械研究所_光学薄膜技术研究与发展中心 |
推荐引用方式 GB/T 7714 | 孙喜莲,范正修,邵建达. Al2O3和Cr过渡层对Ag膜光学性质及其附着力的影响[J]. 金属学报,2007,43(3):163, 166. |
APA | 孙喜莲,范正修,&邵建达.(2007).Al2O3和Cr过渡层对Ag膜光学性质及其附着力的影响.金属学报,43(3),163. |
MLA | 孙喜莲,et al."Al2O3和Cr过渡层对Ag膜光学性质及其附着力的影响".金属学报 43.3(2007):163. |
入库方式: OAI收割
来源:上海光学精密机械研究所
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