Influence of oxygen plasma treatment on properties of ZrO2 films prepared by e-beam evaporation techniques
文献类型：期刊论文
| 作者 | Zhang Dongping ; Fan Ping ; Cai Xing-Min ; Liang Guangxing ; Shao JD(邵建达) ; Wang Congjuan ; Zhang Dawei ; Fan ZX(范正修) |
| 刊名 | solid state commun.
 |
| 出版日期 | 2008 |
| 卷号 | 148期号:1-2页码:22 |
| 关键词 | thin film plasma treatment microstructure optical property |
| ISSN号 | 0038-1098 |
| 中文摘要 | zirconia films were prepared by e-beam evaporation, and oxygen plasma treatment was used to modify film properties. spectrophotometry, x-ray diffractometry (xrd), and atomic force microscopy were used to characterize refractive index, extinction coefficient, rnicrostructure, and surface roughness, respectively. the experimental results indicate that both refractive index and extinction coefficient of the films were reduced slightly after oxygen plasma treatment, with the decrease of intrinsic stress and surface roughness. from xrd spectra, the intensity decrease of the t(110) diffraction peak was clearly observed after the treatment, which was caused by the restructuring of the film atoms. (c) 2008 elsevier ltd. all rights reserved. |
| 学科主题 | 光学薄膜 |
| 收录类别 | EI |
| 资助信息 | national natural science foundation of china [60608020]; shenzhen government [200717] |
| 语种 | 英语 |
| 公开日期 | 2009-09-22 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/4662]  |
| 专题 | 上海光学精密机械研究所_光学薄膜技术研究与发展中心 |
| 推荐引用方式 GB/T 7714 |
Zhang Dongping,Fan Ping,Cai Xing-Min,et al. Influence of oxygen plasma treatment on properties of ZrO |
| APA |
Zhang Dongping.,Fan Ping.,Cai Xing-Min.,Liang Guangxing.,邵建达.,...&范正修.(2008).Influence of oxygen plasma treatment on properties of ZrO |
| MLA |
Zhang Dongping,et al."Influence of oxygen plasma treatment on properties of ZrO |
入库方式： OAI收割
来源：上海光学精密机械研究所
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