Working pressure dependence of properties of Al2O3 thin films prepared by electron beam evaporation
文献类型：期刊论文
| 作者 | Zhan MQ(占美琼) ; Wu Zhong-Lin ; Fan Zheng-Xiu |
| 刊名 | chin. phys. lett.
 |
| 出版日期 | 2008 |
| 卷号 | 25期号:2页码:563 |
| 关键词 | INDUCED DAMAGE THRESHOLD ASSISTED DEPOSITION LASER DAMAGE COATINGS HFO2 SIO2 |
| ISSN号 | 0256-307x |
| 中文摘要 | the effects of working pressure on properties of al2o3 thin films are investigated. transmittance of the al2o3 thin film is measured by a lambda 900 spectrometer. laser-induced damage threshold (lidt) is measured by a nd:yag laser at 355nm with a pulse width of 7ns. microdefects were observed under a nomarski microscope. the samples are characterized by optical properties and defect, as well as lidt under the 355 nm nd: yag laser radiation. it is found that the working pressure has fundamental effect on the lidt. it is the absorption rather than the microdefect that plays an important role on the lid t of al2o3 thin film. |
| 学科主题 | 光学薄膜 |
| 语种 | 英语 |
| WOS记录号 | WOS:000253316600057 |
| 公开日期 | 2009-09-22 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/4670]  |
| 专题 | 上海光学精密机械研究所_光学薄膜技术研究与发展中心 |
| 推荐引用方式 GB/T 7714 | Zhan MQ,Wu Zhong-Lin,Fan Zheng-Xiu. Working pressure dependence of properties of Al2O3 thin films prepared by electron beam evaporation[J]. chin. phys. lett.,2008,25(2):563, 565. |
| APA | 占美琼,Wu Zhong-Lin,&Fan Zheng-Xiu.(2008).Working pressure dependence of properties of Al2O3 thin films prepared by electron beam evaporation.chin. phys. lett.,25(2),563. |
| MLA | 占美琼,et al."Working pressure dependence of properties of Al2O3 thin films prepared by electron beam evaporation".chin. phys. lett. 25.2(2008):563. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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