High-performance 4H-SiC based metal-semiconductor-metal ultraviolet photodetectors with Al2 O3 SiO2 films
文献类型：期刊论文
| 作者 | Zhang Feng ; Yang Weifeng ; Huang Huolin ; Chen Xiaping ; Wu Zhengyun ; Zhu Huili ; Qi Hongji ; Yao JK(姚建可) ; Fan ZX(范正修) ; Shao JD(邵建达) |
| 刊名 | appl. phys. lett.
 |
| 出版日期 | 2008 |
| 卷号 | 92期号:25页码:251102 |
| 关键词 | Metal-semiconductor- metal Silicon carbide (SiC) Ultra-violet Ultra-violet photodetectors |
| ISSN号 | 0003-6951 |
| 中文摘要 | 4h-silicon carbide (sic) metal-semiconductor-metal (msm) ultraviolet (uv) photodetectors with al2o3/sio2 (a/s) films employed as antireflection/passivation layers have been demonstrated. the devices showed a peak responsivity of 0.12 a/w at 290 nm and maximum external quantum efficiency of 50% at 280 nm under 20 v electrical bias, which were much larger than conventional msm detectors. the redshift of peak responsivity and response restriction effect were found and analyzed. the a/s/4h-sic msm photodetectors were also shown to possess outstanding features including high uv to visible rejection ratio, large photocurrent, etc. these results demonstrate a/s/4h-sic photodetectors as a promising candidate for oeic applications. (c) 2008 american institute of physics. |
| 学科主题 | 光学薄膜 |
| 收录类别 | EI |
| 语种 | 英语 |
| 公开日期 | 2009-09-22 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/4674]  |
| 专题 | 上海光学精密机械研究所_光学薄膜技术研究与发展中心 |
| 推荐引用方式 GB/T 7714 |
Zhang Feng,Yang Weifeng,Huang Huolin,et al. High-performance 4H-SiC based metal-semiconductor-metal ultraviolet photodetectors with Al |
| APA |
Zhang Feng.,Yang Weifeng.,Huang Huolin.,Chen Xiaping.,Wu Zhengyun.,...&邵建达.(2008).High-performance 4H-SiC based metal-semiconductor-metal ultraviolet photodetectors with Al |
| MLA |
Zhang Feng,et al."High-performance 4H-SiC based metal-semiconductor-metal ultraviolet photodetectors with Al |
入库方式： OAI收割
来源：上海光学精密机械研究所
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