Effects of annealing on microstructure and optical properties of TiO2 sculptured thin films
文献类型：期刊论文
| 作者 | Xiao Xiu-Di ; Dong Guo-Ping ; Qi HJ(齐红基) ; Fan ZX(范正修) ; He HB(贺洪波) ; Shao JD(邵建达) |
| 刊名 | chin. phys. lett.
 |
| 出版日期 | 2008 |
| 卷号 | 25期号:6页码:2181 |
| 关键词 | GLANCING ANGLE DEPOSITION TITANIUM-DIOXIDE TEMPERATURE |
| ISSN号 | 0256-307x |
| 中文摘要 | the evolution of microstructure and optical properties of tio2 sculptured thin films under thermal annealing is reported. xrd, field emission sem, uv-vis-nir spectra are employed to characterize the microstructural and optical properties. it is found that the optimum annealing temperature for linear birefringence is 500 degrees c. the maximum of transmission difference for linear birefringence is up to 18%, which is more than twice of that in as-deposited thin films. in addition, the sample annealed at 500 degrees c has a minimum of column angle about 12 degrees c. the competitive process between the microstructural and optical properties is discussed in detail. post-annealing is a useful method to improve the linear birefringence in sculptured thin films for practical applications. |
| 学科主题 | 光学薄膜 |
| 语种 | 英语 |
| 公开日期 | 2009-09-22 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/4696]  |
| 专题 | 上海光学精密机械研究所_光学薄膜技术研究与发展中心 |
| 推荐引用方式 GB/T 7714 | Xiao Xiu-Di,Dong Guo-Ping,Qi HJ,et al. Effects of annealing on microstructure and optical properties of TiO2 sculptured thin films[J]. chin. phys. lett.,2008,25(6):2181, 2184. |
| APA | Xiao Xiu-Di,Dong Guo-Ping,齐红基,范正修,贺洪波,&邵建达.(2008).Effects of annealing on microstructure and optical properties of TiO2 sculptured thin films.chin. phys. lett.,25(6),2181. |
| MLA | Xiao Xiu-Di,et al."Effects of annealing on microstructure and optical properties of TiO2 sculptured thin films".chin. phys. lett. 25.6(2008):2181. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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