Investigation on properties of TiO2 thin films deposited at different oxygen pressures
文献类型：期刊论文
| 作者 | Shen Yanming ; Yu Hua ; Yao JK(姚建可) ; Shao SY(邵淑英) ; Fan ZX(范正修) ; He HB(贺洪波) ; Shao JD(邵建达) |
| 刊名 | opt. laser technol.
 |
| 出版日期 | 2008 |
| 卷号 | 40期号:3页码:550 |
| 关键词 | TiO2 thin films residual stress electron beam evaporation |
| ISSN号 | 0030-3992 |
| 中文摘要 | tio2 thin films were prepared by electron beam evaporation at different oxygen partial pressures. the influences of oxygen partial pressure on optical, mechanical and structural properties of tio2 thin films were studied. the results showed that with the increase of oxygen partial pressure, the optical transmittance gradually increased, the transmittance edge gradually shifted to short wavelength, and the corresponding refractive index decreased. the residual stresses of all samples were tensile, and the value increased as oxygen partial pressure increasing, which corresponded to the evolutions of the packing densities. the structures of tio2 thin films all were amorphous because deposition particles did not possess enough energy to crystallize. (c) 2007 elsevier ltd. all rights reserved. |
| 学科主题 | 光学薄膜 |
| 语种 | 英语 |
| WOS记录号 | WOS:000251747700019 |
| 公开日期 | 2009-09-22 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/4714]  |
| 专题 | 上海光学精密机械研究所_光学薄膜技术研究与发展中心 |
| 推荐引用方式 GB/T 7714 | Shen Yanming,Yu Hua,Yao JK,et al. Investigation on properties of TiO2 thin films deposited at different oxygen pressures[J]. opt. laser technol.,2008,40(3):550, 554. |
| APA | Shen Yanming.,Yu Hua.,姚建可.,邵淑英.,范正修.,...&邵建达.(2008).Investigation on properties of TiO2 thin films deposited at different oxygen pressures.opt. laser technol.,40(3),550. |
| MLA | Shen Yanming,et al."Investigation on properties of TiO2 thin films deposited at different oxygen pressures".opt. laser technol. 40.3(2008):550. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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