Influences of CO2 laser annealing on mechanical and laser-induced damage properties of ZrO2 thin films
文献类型：期刊论文
| 作者 | Wei Chaoyang ; Deng DG(邓德刚) ; Tian Guanglei ; He HB(贺洪波) ; Shao JD(邵建达) ; Fan ZX(范正修) |
| 刊名 | optik
 |
| 出版日期 | 2008 |
| 卷号 | 119期号:13页码:624 |
| 关键词 | CO2 laser annealing Weak absorption Laser-induced damage threshold Residual stress |
| ISSN号 | 0030-4026 |
| 中文摘要 | zirconium dioxide (zro2) thin films were deposited on bk7 glass substrates by the electron beam evaporation method. a continuous wave co2 laser was used to anneal the zro2 thin films to investigate whether beneficial changes could be produced. after annealing at different laser scanning speeds by co2 laser, weak absorption of the coatings was measured by the surface thermal lensing (stl) technique, and then laser-induced damage threshold (lidt) was also determined. it was found that the weak absorption decreased first, while the laser scanning speed is below some value, then increased. the lidt of the zro2 coatings decreased greatly when the laser scanning speeds were below some value. a nomarski microscope was employed to map the damage morphology, and it was found that the damage behavior was defect-initiated both for annealed and as-deposited samples. the influences of post-deposition co2 laser annealing on the structural and mechanical properties of the films have also been investigated by x-ray diffraction and zygo interferometer. it was found that the microstructure of the zro2 films did not change. the residual stress in zro2 films showed a tendency from tensile to compressive after co, laser annealing, and the variation quantity of the residual stress increased with decreasing laser scanning speed. the residual stress may be mitigated to some extent at proper treatment parameters. (c) 2007 elsevier gmbh. all rights reserved. |
| 学科主题 | 光学薄膜 |
| 收录类别 | EI |
| 资助信息 | national high-tech research and development program of china |
| 语种 | 英语 |
| 公开日期 | 2009-09-22 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/4724]  |
| 专题 | 上海光学精密机械研究所_光学薄膜技术研究与发展中心 |
| 推荐引用方式 GB/T 7714 | Wei Chaoyang,Deng DG,Tian Guanglei,et al. Influences of CO2 laser annealing on mechanical and laser-induced damage properties of ZrO2 thin films[J]. optik,2008,119(13):624, 629. |
| APA | Wei Chaoyang,邓德刚,Tian Guanglei,贺洪波,邵建达,&范正修.(2008).Influences of CO2 laser annealing on mechanical and laser-induced damage properties of ZrO2 thin films.optik,119(13),624. |
| MLA | Wei Chaoyang,et al."Influences of CO2 laser annealing on mechanical and laser-induced damage properties of ZrO2 thin films".optik 119.13(2008):624. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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