中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
不同方法制备的Ta_2O_5薄膜光学性能和激光损伤阈值的对比分析

文献类型:期刊论文

作者许程 ; 董洪成 ; 肖祁陵 ; 麻健勇 ; 晋云霞 ; 邵建达
刊名中国激光
出版日期2008
卷号35期号:10页码:1595
关键词薄膜 激光损伤阈值 吸收 退火 Beam evaporations Damage thresholds High purities Impurity contents Laser induced damage threshold Mean squares Microdefect densities RMS roughnesses Starting materials
ISSN号0258-7025
其他题名Optical properties and laser-induced damage threshold of Ta2O5 films deposited by different methods
中文摘要采用电子束蒸发(EBE)和离子束溅射(IBS)制备了不同的Ta_2O_5薄膜,同时对电子束蒸发制备的薄膜进行了退火处理。研究了制备的Ta_2O_5薄膜的光学性能、激光损伤阈值(LIDT)、吸收、散射、粗糙度、微缺陷密度和杂质含量。结果表明,退火可使电子束蒸发制备的薄膜的光学性能得到改善,接近离子束溅射的薄膜的光学性能。电子束蒸发制备的薄膜的损伤阈值较低的主要原因在于吸收大,微缺陷密度和杂质含量高,而与薄膜的散射和粗糙度关系不大。退火后薄膜的吸收和微缺陷密度都明显降低,损伤阈值得到提高。退火后的薄膜损伤阈值仍然低于溅射得到的薄膜损伤阈值是因为退火并不能降低膜内的杂质含量,因此选用高纯度的蒸发膜料和减少电子束蒸发过程中的污染有可能进一步提高薄膜的损伤阈值。; Ta2O5 films were prepared on BK7 substrates using electron-beam evaporation (EBE) and ion-beam sputtering (IBS), and the films deposited by EBE were also annealed. The optical properties, laser-induced damage threshold (LIDT), absorption, scattering and root-mean square (RMS) roughness, microdefect density and impurity content of the prepared films were investigated. The results show that the optical properties of the annealed Ta2O5 films deposited by EBE can be improved near to that by IBS. The LIDT of Ta2O5 films deposited by EBE is lower than that by IBS, which is due to the larger absorption, microdefect density and impurity content and has nothing with the scattering and RMS roughness. The films prepared by EBE after being annealed show lower absorption and microdefect density, and improved LIDT. The LIDT after being annealed is still lower than that by IBS, which can be attributed to that the annealing cannot decrease the impurity content of the films. Therefore, the higher LIDT would be achieved by using high purity starting material and reducing the contaminant in the evaporation course.
学科主题光学薄膜
收录类别EI
语种中文
公开日期2009-09-22
源URL[http://ir.siom.ac.cn/handle/181231/4748]  
专题上海光学精密机械研究所_光学薄膜技术研究与发展中心
推荐引用方式
GB/T 7714
许程,董洪成,肖祁陵,等. 不同方法制备的Ta_2O_5薄膜光学性能和激光损伤阈值的对比分析[J]. 中国激光,2008,35(10):1595, 1599.
APA 许程,董洪成,肖祁陵,麻健勇,晋云霞,&邵建达.(2008).不同方法制备的Ta_2O_5薄膜光学性能和激光损伤阈值的对比分析.中国激光,35(10),1595.
MLA 许程,et al."不同方法制备的Ta_2O_5薄膜光学性能和激光损伤阈值的对比分析".中国激光 35.10(2008):1595.

入库方式: OAI收割

来源:上海光学精密机械研究所

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