Structure and optical properties of Nb2 O5 sculptured thin films by glancing angle deposition
文献类型：期刊论文
| 作者 | Xiao Xiudi ; Dong Guoping ; Xu Cheng ; He HB(贺洪波) ; Qi Hongji ; Fan ZX(范正修) ; Shao JD(邵建达) |
| 刊名 | appl. surf. sci.
 |
| 出版日期 | 2008 |
| 卷号 | 255期号:5页码:2192 |
| 关键词 | Glancing angle deposition Nb2O5 sculptured thin films Birefringence |
| ISSN号 | 0169-4332 |
| 中文摘要 | nb2o5 sculptured thin. films deposited by electron beam evaporation with glancing angle deposition were prepared. nb2o5 sculptured thin. films with tilted columns are optical anisotropy. xrd, sem, uv-vis-nir spectra are employed to characterize the microstructure and optical properties. the maximum of birefringence (delta n) is up to 0.045 at alpha = 70 degrees with packing density of 0.487. with increasing the deposition angle, refractive index and packing density of nb2o5 stf are decreasing. the relationship among deposition parameter, microstructure and optical properties was investigated in detail. (c) 2008 elsevier b. v. all rights reserved. |
| 学科主题 | 光学薄膜 |
| 收录类别 | EI |
| 资助信息 | national natural science foundation of china [60778026]; shanghai rising-star program [07qb14006] |
| 语种 | 英语 |
| 公开日期 | 2009-09-22 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/4760]  |
| 专题 | 上海光学精密机械研究所_光学薄膜技术研究与发展中心 |
| 推荐引用方式 GB/T 7714 |
Xiao Xiudi,Dong Guoping,Xu Cheng,et al. Structure and optical properties of Nb |
| APA |
Xiao Xiudi.,Dong Guoping.,Xu Cheng.,贺洪波.,Qi Hongji.,...&邵建达.(2008).Structure and optical properties of Nb |
| MLA |
Xiao Xiudi,et al."Structure and optical properties of Nb |
入库方式： OAI收割
来源：上海光学精密机械研究所
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