中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
High refractive index TiO2 film deposited by electron beam evaporation

文献类型:期刊论文

作者Yao JK(姚建可) ; Huang H. L. ; Ma J. Y. ; Jin Y. X. ; Zhao Y. A. ; Shao J. D. ; He H. B. ; Yi K. ; Fan Z. X. ; Zhang F. ; Wu Z. Y.
刊名surf. eng.
出版日期2009
卷号25期号:3页码:257
关键词Crystal seed Rutile TiO2 film High refractive index Electron beam evaporation
ISSN号0267-0844
中文摘要the well known 'crystal seed' theory is first applied in this work to prepare tio2 film: a high refractive index rutile tio2 film is grown by electron beam evaporation on the rutile seed formed by 1100 degrees c annealing. the average n is larger than 2.4, by far the highest in all the authors' tio2 films. the films are characterised by optical properties, microstructure and surface morphologies. it is found that the refractive index shows positive relation with the crystal structure, grain size, and packing density and roughness of the film. the film has lower density of granularity and nodule defects on the surface than those of the film deposited by magnetron sputtering. the result shows attractive application in complex filter and laser coatings.
学科主题光学薄膜
语种英语
WOS记录号WOS:000264352500014
公开日期2009-09-22
源URL[http://ir.siom.ac.cn/handle/181231/4784]  
专题上海光学精密机械研究所_光学薄膜技术研究与发展中心
推荐引用方式
GB/T 7714
Yao JK,Huang H. L.,Ma J. Y.,et al. High refractive index TiO2 film deposited by electron beam evaporation[J]. surf. eng.,2009,25(3):257, 260.
APA 姚建可.,Huang H. L..,Ma J. Y..,Jin Y. X..,Zhao Y. A..,...&Wu Z. Y..(2009).High refractive index TiO2 film deposited by electron beam evaporation.surf. eng.,25(3),257.
MLA 姚建可,et al."High refractive index TiO2 film deposited by electron beam evaporation".surf. eng. 25.3(2009):257.

入库方式: OAI收割

来源:上海光学精密机械研究所

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