Carbon transition efficiency and process cost in high-rate, large-area deposition of diamond films by DC arc plasma jet
文献类型：期刊论文
| 作者 | Pan WX(潘文霞) ; Lv FX(吕反修); Tang WZ(唐伟忠); Zhong GF(钟国仿); Jiang Z(蒋政); Wu CK(吴承康)
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| 刊名 | Diamond and Related Materials
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| 出版日期 | 2000 |
| 卷号 | 9期号:9-10页码:1682-1686 |
| ISSN号 | 0925-9635 |
| 通讯作者 | Pan, WX (reprint author), Chinese Acad Sci, Inst Mech, Beijing 100080, Peoples R China. |
| 中文摘要 | A new DC plasma torch in which are jet states and deposition parameters can be regulated over a wide range has been built. It showed advantages in producing stable plasma conditions at a small gas flow rate. Plasma jets with and without magnetically rotated arcs could be generated. With straight are jet deposition, diamond films could be formed at a rate of 39 mu m/h on Mo substrates of Phi 25 mm, and the conversion rate of carbon in CH4 to diamond was less than 3%. Under magnetically rotated conditions, diamond films could be deposited uniformly in a range of Phi 40 mm at 30 mu m/h, with a quite low total gas flow rate and high carbon conversion rate of over 11%. Mechanisms of rapid and uniform deposition of diamond films with low gas consumption and high carbon transition efficiency are discussed. |
| 学科主题 | 力学 |
| 类目[WOS] | Materials Science, Multidisciplinary |
| 研究领域[WOS] | Materials Science |
| 关键词[WOS] | CHEMICAL-VAPOR-DEPOSITION |
| 收录类别 | SCI ; EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000089203100025 |
| 公开日期 | 2007-06-15 ; 2007-12-05 ; 2009-06-23 |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/16682]  |
| 专题 | 力学研究所_力学所知识产出(1956-2008) |
| 推荐引用方式 GB/T 7714 | Pan WX,Lv FX,Tang WZ,et al. Carbon transition efficiency and process cost in high-rate, large-area deposition of diamond films by DC arc plasma jet[J]. Diamond and Related Materials,2000,9(9-10):1682-1686. |
| APA | 潘文霞,吕反修,唐伟忠,钟国仿,蒋政,&吴承康.(2000).Carbon transition efficiency and process cost in high-rate, large-area deposition of diamond films by DC arc plasma jet.Diamond and Related Materials,9(9-10),1682-1686. |
| MLA | 潘文霞,et al."Carbon transition efficiency and process cost in high-rate, large-area deposition of diamond films by DC arc plasma jet".Diamond and Related Materials 9.9-10(2000):1682-1686. |
入库方式： OAI收割
来源：力学研究所
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