Fabrication of a miniature twin-fuel-cell on silicon wafer
文献类型：期刊论文
| 作者 | Yu, JR; Cheng, P; Ma, ZQ; Yi, BL |
| 刊名 | electrochimica acta
 |
| 出版日期 | 2003-05-15 |
| 卷号 | 48期号:11页码:1537-1541 |
| 关键词 | miniature fuel cell twin-fuel-cell microfabrication silicon wafer interconnect resistance |
| 产权排序 | 2;1 |
| 英文摘要 | the fabrication and performance evaluation of a miniature twin-fuel-cell on silicon wafers are presented in this paper. the miniature twin-fuel-cell was fabricated in series using two membrane-electrode-assemblies sandwiched between two silicon substrates in which electric current, reactant, and product flow. the novel structure of the miniature twin-fuel-cell is that the electricity interconnect from the cathode of one cell to the anode of another cell is made on the same plane. the interconnect was fabricated by sputtering a layer of copper over a layer of gold on the top of the silicon wafer. silicon dioxide was deposited on the silicon wafer adjacent to the copper layer to prevent short-circuiting between the twin cells. the feed holes and channels in the silicon wafers were prepared by anisotropic silicon etching from the back and front of the wafer with silicon dioxide acting as intrinsic etch-stop layer. operating on dry h-2/o-2 at 25 degreesc and atmospheric pressure, the measured peak power density was 190.4 mw/cm(2) at 270 ma/cm(2) for the miniature twin-fuel-cell using a nafion 112 membrane. based on the polarization curves of the twin-fuel-cell and the two single cells, the interconnect resistance between the twin cells was calculated to be in the range from 0.0113 omega (at 10 ma/cm(2)) to 0.0150 omega (at 300 ma/cm(2)), which is relatively low. (c) 2003 elsevier science ltd. all rights reserved. |
| WOS标题词 | science & technology ; physical sciences |
| 类目[WOS] | electrochemistry |
| 研究领域[WOS] | electrochemistry |
| 收录类别 | SCI |
| 原文出处 | true |
| 语种 | 英语 |
| WOS记录号 | WOS:000182330700009 |
| 公开日期 | 2010-11-30 |
| 源URL | [http://159.226.238.44/handle/321008/82771]  |
| 专题 | 大连化学物理研究所_中国科学院大连化学物理研究所 |
| 作者单位 | 1.Hong Kong Univ Sci & Technol, Dept Mech Engn, Kowloon, Hong Kong, Peoples R China 2.Chinese Acad Sci, Dalian Inst Chem Phys, Fuel Cell R&D Ctr, Dalian 116023, Peoples R China |
| 推荐引用方式 GB/T 7714 | Yu, JR,Cheng, P,Ma, ZQ,et al. Fabrication of a miniature twin-fuel-cell on silicon wafer[J]. electrochimica acta,2003,48(11):1537-1541. |
| APA | Yu, JR,Cheng, P,Ma, ZQ,&Yi, BL.(2003).Fabrication of a miniature twin-fuel-cell on silicon wafer.electrochimica acta,48(11),1537-1541. |
| MLA | Yu, JR,et al."Fabrication of a miniature twin-fuel-cell on silicon wafer".electrochimica acta 48.11(2003):1537-1541. |
入库方式： OAI收割
来源：大连化学物理研究所
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