Effects of superimposed pulse bias on TiN coating in cathodic arc deposition
文献类型：期刊论文
| 作者 | Li ZY(李正阳) ; Zhu WB(朱武飚); Zhang Y(张勇); Li GY(李桂英); Cao EY(曹尔妍)
|
| 刊名 | Surface & Coatings Technology
 |
| 出版日期 | 2000 |
| 卷号 | 131期号:1-3页码:158-161 |
| ISSN号 | 0257-8972 |
| 通讯作者 | Li, ZY (reprint author), Chinese Acad Sci, Inst Mech, Beijing 100080, Peoples R China. |
| 中文摘要 | Orthogonal designs are used to investigate the main factors when doing experiments in which pulse bias is superimposed on d.c. bias during cathodic are deposition of TiN. Pulse peak, duty cycle, frequency, direct voltage, are current and pressure all are investigated when coating TiN on HSS substrates. Roughness, surface micrograph, microhardness and thickness are tested. By analysis of variance, it is shown that pressure and frequency are the main factors. R-a and droplet density of the film with (d.c. + pulse) bias decrease. A simple explanation for the result is suggested. |
| 学科主题 | 力学 |
| 类目[WOS] | Materials Science, Coatings & Films ; Physics, Applied |
| 研究领域[WOS] | Materials Science ; Physics |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000165548200032 |
| 公开日期 | 2007-06-15 |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/16804]  |
| 专题 | 力学研究所_力学所知识产出(1956-2008) |
| 推荐引用方式 GB/T 7714 | Li ZY,Zhu WB,Zhang Y,et al. Effects of superimposed pulse bias on TiN coating in cathodic arc deposition[J]. Surface & Coatings Technology,2000,131(1-3):158-161. |
| APA | 李正阳,朱武飚,张勇,李桂英,&曹尔妍.(2000).Effects of superimposed pulse bias on TiN coating in cathodic arc deposition.Surface & Coatings Technology,131(1-3),158-161. |
| MLA | 李正阳,et al."Effects of superimposed pulse bias on TiN coating in cathodic arc deposition".Surface & Coatings Technology 131.1-3(2000):158-161. |
入库方式： OAI收割
来源：力学研究所
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