Study on the Electromagnetic Radiation Characteristics of Discharging Excimer Laser System
文献类型：会议论文
| 作者 | Duliang Zhao1,2; Xu Liang1 ; Xiaodong Fang1,2; Qingsheng Wang1
|
| 出版日期 | 2016 |
| 会议名称 | conference on high power lasers, high energy lasers, and silicon-based photonic integration |
| 会议日期 | 2016 |
| 会议地点 | beijing, peoples r china |
| 源URL | [http://ir.hfcas.ac.cn:8080/handle/334002/21607]  |
| 专题 | 合肥物质科学研究院_中科院安徽光学精密机械研究所 |
| 作者单位 | 1.Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031, China； 2.University of Science and Technology of China, Hefei 230029,China |
| 推荐引用方式 GB/T 7714 | Duliang Zhao,Xu Liang,Xiaodong Fang,et al. Study on the Electromagnetic Radiation Characteristics of Discharging Excimer Laser System[C]. 见:conference on high power lasers, high energy lasers, and silicon-based photonic integration. beijing, peoples r china. 2016. |
入库方式： OAI收割
来源：合肥物质科学研究院
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