中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Effects of Substrate Pulse Bias Duty Cycle on the Microstructure and Mechanical Properties of Ti-Cu-N Films Deposited by Magnetic Field-Enhanced Arc Ion Plating

文献类型:期刊论文

作者Zhao, Sheng-Sheng ; Zhao, Yan-Hui ; Cheng, Lv-Sha ; Denisov, Vladimir Viktorovich ; Koval, Nikolay Nikolaevich ; Yu, Bao-Hai ; Mei, Hai-Juan
刊名ACTA METALLURGICA SINICA-ENGLISH LETTERS
出版日期2017-02-01
卷号30期号:2页码:176-184
关键词Magnetic field Arc ion plating Ti-Cu-N film Residual stress Hardness
ISSN号1006-7191
通讯作者Zhao, SS (reprint author), Shenzhen Polytech, Sch Mech & Elect Engn, Shenzhen 518055, Peoples R China.
中文摘要Ti-Cu-N films were deposited on 316L stainless steel substrates by magnetic field-enhanced arc ion plating. The effect of substrate pulse bias duty cycle on the chemical composition, microstructure, surface morphology, mechanical and tribological properties of the films was systemically investigated. The results showed that, with increasing the duty cycle, Cu content decreases from 3.3 to 0.58 at.%. XRD results showed that only TiN phase is observed for all the deposited films and the preferred orientation transformed from TiN(200) to TiN(111) plane with the increase in duty cycle. The surface roughness and deposition rate showed monotonous decrease with increasing the duty cycle. The residual stress and hardness firstly increase and then decrease afterwards with the increase in duty cycle, while the variation of critical load shows reverse trend. Except for the film with duty cycle of 10%, others perform the better wear resistance.
学科主题Metallurgy & Metallurgical Engineering
收录类别SCI
资助信息National Natural Science Foundation of China [51401128]; Shenzhen Science and Technology Project [JCYJ20140508155916426]
语种英语
公开日期2017-08-17
源URL[http://ir.imr.ac.cn/handle/321006/78302]  
专题金属研究所_中国科学院金属研究所
推荐引用方式
GB/T 7714
Zhao, Sheng-Sheng,Zhao, Yan-Hui,Cheng, Lv-Sha,et al. Effects of Substrate Pulse Bias Duty Cycle on the Microstructure and Mechanical Properties of Ti-Cu-N Films Deposited by Magnetic Field-Enhanced Arc Ion Plating[J]. ACTA METALLURGICA SINICA-ENGLISH LETTERS,2017,30(2):176-184.
APA Zhao, Sheng-Sheng.,Zhao, Yan-Hui.,Cheng, Lv-Sha.,Denisov, Vladimir Viktorovich.,Koval, Nikolay Nikolaevich.,...&Mei, Hai-Juan.(2017).Effects of Substrate Pulse Bias Duty Cycle on the Microstructure and Mechanical Properties of Ti-Cu-N Films Deposited by Magnetic Field-Enhanced Arc Ion Plating.ACTA METALLURGICA SINICA-ENGLISH LETTERS,30(2),176-184.
MLA Zhao, Sheng-Sheng,et al."Effects of Substrate Pulse Bias Duty Cycle on the Microstructure and Mechanical Properties of Ti-Cu-N Films Deposited by Magnetic Field-Enhanced Arc Ion Plating".ACTA METALLURGICA SINICA-ENGLISH LETTERS 30.2(2017):176-184.

入库方式: OAI收割

来源:金属研究所

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