中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Design of control system for high-power TEA CO2laser

文献类型:期刊论文

作者Yu, D.; L. Guo; F. Chen; F. Meng; G. Yang and M. Shao
刊名Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering
出版日期2016
卷号45期号:7
英文摘要To meet the wide angular bandpass requirement of a small-size mirror in extreme ultra violet (EUV) lithography illumination system, the designed broadband molybdenum (Mo)/silicon (Si) multilayer stack is deposited by using the relationship between effective thickness of Si layers and velocity and the relationship between periodic thickness of multilayers and velocity. Mo/Si periodic multilayers with different periodic thicknesses and G (ratio of Mo layer thickness and periodic thickness of multilayer films) are deposited by magnetron sputtering and characterized by small-angle X-ray reflectometry. The relationship between periodic thickness of multilayers and velocity, the relationship between effective thickness of Mo and Si layers and velocity, and the interface roughness of multilayers are provided by characterization of X-ray reflection spectrum. The broadband multilayer stack is designed by utilizing the Levenberg-Marquardt algorithm, and the designed EUV reflectance is R=42%1% at the range of 16.8~24.8. The designed stack is deposited according to the relationship between effective thickness of Si layers and velocity and the relationship between periodic thickness of multilayers and velocity. The measured EUV reflectance of the broadband Mo/Si multilayer stack is 41.2%~43.0% at the range of 16.8~24.8, which is very close to the designed value. Further fabrication error reversion indicates that the small difference between the experimental and designed results is mainly caused by the systematic error in the calibration of value and interface roughness of Mo/Si multilayers. 2016, Chinese Lasers Press. All right reserved.
收录类别EI
语种中文
源URL[http://ir.ciomp.ac.cn/handle/181722/57375]  
专题长春光学精密机械与物理研究所_中科院长春光机所知识产出
推荐引用方式
GB/T 7714
Yu, D.,L. Guo,F. Chen,et al. Design of control system for high-power TEA CO2laser[J]. Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering,2016,45(7).
APA Yu, D.,L. Guo,F. Chen,F. Meng,&G. Yang and M. Shao.(2016).Design of control system for high-power TEA CO2laser.Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering,45(7).
MLA Yu, D.,et al."Design of control system for high-power TEA CO2laser".Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering 45.7(2016).

入库方式: OAI收割

来源:长春光学精密机械与物理研究所

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