中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Complementary Metal Oxide Semiconductor-Compatible, High-Mobility, < 111 >-Oriented GaSb Nanowires Enabled by Vapor-Solid-Solid Chemical Vapor Deposition

文献类型:期刊论文

作者Yang, Zai-xing1,2,3; Liu, Lizhe5; Yip, SenPo3,6; Li, Dapan3; Shen, Lifan4,6; Zhou, Ziyao3; Han, Ning7; Hung, Tak Fu3; Pun, Edwin Yue-Bun4,6; Wu, Xinglong5
刊名ACS NANO
出版日期2017-04-01
卷号11期号:4页码:4237-4246
ISSN号1936-0851
关键词Gasb Nanowires Growth Orientation High Mobility Vapor-solid-solid Interface Plane Orientation In-plane Lattice Mismatch
DOI10.1021/acsnano.7b01217
文献子类Article
英文摘要

Using CMOS-compatible Pd catalysts, we demonstrated the formation of high-mobility < 111 >-oriented GaSb nanowires (NWs) via vapor solid solid (VSS) growth by surfactant-assisted chemical vapor deposition through a complementary experimental and theoretical approach. In contrast to NWs formed by the conventional vapor liquid solid (VLS) mechanism, cylindrical-shaped Pd5Ga4 catalytic seeds were present in our Pd-catalyzed VSS-NWs. As solid catalysts, stoichiometric Pd5Ga4 was found to have the lowest crystal surface energy and thus giving rise to a minimal surface diffusion as well as an optimal in-plane interface orientation at the seed/NW interface for efficient epitaxial NW nucleation. These VSS characteristics led to the growth of slender NWs with diameters down to 26.9 +/- 3.5 nm. Over 95% high crystalline quality NWs were grown in < 111 > orientation for a wide diameter range of between 10 and 70 nm. Back-gated field-effect transistors (FETs) fabricated using the Pd-catalyzed GaSb NWs exhibit a superior peak hole mobility of, similar to 330 cm(2) V-1 close to the mobility limit for a NW channel diameter of similar to 30 nm with a free carrier concentration of similar to 10(18) cm(-3). This suggests that the NWs have excellent homogeneity in phase purity, growth orientation, surface morphology and electrical characteristics. Contact printing process was also used to fabricate large-scale assembly of Pd-catalyzed GaSb NW parallel arrays, confirming the potential constructions and applications of these high-performance electronic devices.

WOS关键词Near-infrared Photodetectors ; Augmented-wave Method ; Single Inas Nanowire ; Silicon Nanowires ; Gaas Nanowires ; Iii-v ; Electrical-properties ; Growth ; Palladium ; Catalyst
WOS研究方向Chemistry ; Science & Technology - Other Topics ; Materials Science
语种英语
WOS记录号WOS:000400233200085
资助机构program of Shandong University, the General Research Fund(CityU 11204614) ; Theme-based Research Scheme of the Research Grants Council of Hong Kong SAR, China(T42-103/16-N) ; National Natural Science Foundation of China(11404162 ; State Key Laboratory of Multiphase Complex Systems(MPCS-2015-A-04) ; Science Technology and Innovation Committee of Shenzhen Municipality(JCYJ20160229165240684) ; PAPD ; Natural Science Foundations of Jiangsu Province(BK20130549) ; 51672229 ; 61504151)
源URL[http://ir.ipe.ac.cn/handle/122111/22827]  
专题过程工程研究所_多相复杂系统国家重点实验室
作者单位1.Shandong Univ, Ctr Nanoelect, Jinan 250100, Peoples R China
2.Shandong Univ, Sch Microelect, Jinan 250100, Peoples R China
3.City Univ Hong Kong, Dept Phys & Mat Sci, 83 Tat Chee Ave, Kowloon, Hong Kong, Peoples R China
4.City Univ Hong Kong, Dept Elect Engn, 83 Tat Chee Ave, Kowloon, Hong Kong, Peoples R China
5.Nanjing Univ, Collaborat Innovat Ctr Adv Microstruct, Natl Lab Solid State Microstruct, Key Lab Modern Acoust,MOE,Inst Acoust, Nanjing 210093, Jiangsu, Peoples R China
6.City Univ Hong Kong, State Key Lab Millimeter Waves, 83 Tat Chee Ave, Kowloon, Hong Kong, Peoples R China
7.Chinese Acad Sci, Inst Proc Engn, State Key Lab Multiphase Complex Syst, Beijing 100190, Peoples R China
8.Univ Manchester, Sch Elect & Elect Engn, Manchester M13 9PL, Lancs, England
推荐引用方式
GB/T 7714
Yang, Zai-xing,Liu, Lizhe,Yip, SenPo,et al. Complementary Metal Oxide Semiconductor-Compatible, High-Mobility, < 111 >-Oriented GaSb Nanowires Enabled by Vapor-Solid-Solid Chemical Vapor Deposition[J]. ACS NANO,2017,11(4):4237-4246.
APA Yang, Zai-xing.,Liu, Lizhe.,Yip, SenPo.,Li, Dapan.,Shen, Lifan.,...&Ho, Johnny C..(2017).Complementary Metal Oxide Semiconductor-Compatible, High-Mobility, < 111 >-Oriented GaSb Nanowires Enabled by Vapor-Solid-Solid Chemical Vapor Deposition.ACS NANO,11(4),4237-4246.
MLA Yang, Zai-xing,et al."Complementary Metal Oxide Semiconductor-Compatible, High-Mobility, < 111 >-Oriented GaSb Nanowires Enabled by Vapor-Solid-Solid Chemical Vapor Deposition".ACS NANO 11.4(2017):4237-4246.

入库方式: OAI收割

来源:过程工程研究所

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