Complementary Metal Oxide Semiconductor-Compatible, High-Mobility, < 111 >-Oriented GaSb Nanowires Enabled by Vapor-Solid-Solid Chemical Vapor Deposition
文献类型:期刊论文
作者 | Yang, Zai-xing1,2,3; Liu, Lizhe5; Yip, SenPo3,6; Li, Dapan3; Shen, Lifan4,6; Zhou, Ziyao3; Han, Ning7; Hung, Tak Fu3; Pun, Edwin Yue-Bun4,6; Wu, Xinglong5 |
刊名 | ACS NANO
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出版日期 | 2017-04-01 |
卷号 | 11期号:4页码:4237-4246 |
关键词 | Gasb Nanowires Growth Orientation High Mobility Vapor-solid-solid Interface Plane Orientation In-plane Lattice Mismatch |
ISSN号 | 1936-0851 |
DOI | 10.1021/acsnano.7b01217 |
文献子类 | Article |
英文摘要 | Using CMOS-compatible Pd catalysts, we demonstrated the formation of high-mobility < 111 >-oriented GaSb nanowires (NWs) via vapor solid solid (VSS) growth by surfactant-assisted chemical vapor deposition through a complementary experimental and theoretical approach. In contrast to NWs formed by the conventional vapor liquid solid (VLS) mechanism, cylindrical-shaped Pd5Ga4 catalytic seeds were present in our Pd-catalyzed VSS-NWs. As solid catalysts, stoichiometric Pd5Ga4 was found to have the lowest crystal surface energy and thus giving rise to a minimal surface diffusion as well as an optimal in-plane interface orientation at the seed/NW interface for efficient epitaxial NW nucleation. These VSS characteristics led to the growth of slender NWs with diameters down to 26.9 +/- 3.5 nm. Over 95% high crystalline quality NWs were grown in < 111 > orientation for a wide diameter range of between 10 and 70 nm. Back-gated field-effect transistors (FETs) fabricated using the Pd-catalyzed GaSb NWs exhibit a superior peak hole mobility of, similar to 330 cm(2) V-1 close to the mobility limit for a NW channel diameter of similar to 30 nm with a free carrier concentration of similar to 10(18) cm(-3). This suggests that the NWs have excellent homogeneity in phase purity, growth orientation, surface morphology and electrical characteristics. Contact printing process was also used to fabricate large-scale assembly of Pd-catalyzed GaSb NW parallel arrays, confirming the potential constructions and applications of these high-performance electronic devices. |
WOS关键词 | Near-infrared Photodetectors ; Augmented-wave Method ; Single Inas Nanowire ; Silicon Nanowires ; Gaas Nanowires ; Iii-v ; Electrical-properties ; Growth ; Palladium ; Catalyst |
WOS研究方向 | Chemistry ; Science & Technology - Other Topics ; Materials Science |
语种 | 英语 |
WOS记录号 | WOS:000400233200085 |
资助机构 | program of Shandong University, the General Research Fund(CityU 11204614) ; Theme-based Research Scheme of the Research Grants Council of Hong Kong SAR, China(T42-103/16-N) ; National Natural Science Foundation of China(11404162 ; State Key Laboratory of Multiphase Complex Systems(MPCS-2015-A-04) ; Science Technology and Innovation Committee of Shenzhen Municipality(JCYJ20160229165240684) ; PAPD ; Natural Science Foundations of Jiangsu Province(BK20130549) ; 51672229 ; 61504151) |
源URL | [http://ir.ipe.ac.cn/handle/122111/22827] ![]() |
专题 | 过程工程研究所_多相复杂系统国家重点实验室 |
作者单位 | 1.Shandong Univ, Ctr Nanoelect, Jinan 250100, Peoples R China 2.Shandong Univ, Sch Microelect, Jinan 250100, Peoples R China 3.City Univ Hong Kong, Dept Phys & Mat Sci, 83 Tat Chee Ave, Kowloon, Hong Kong, Peoples R China 4.City Univ Hong Kong, Dept Elect Engn, 83 Tat Chee Ave, Kowloon, Hong Kong, Peoples R China 5.Nanjing Univ, Collaborat Innovat Ctr Adv Microstruct, Natl Lab Solid State Microstruct, Key Lab Modern Acoust,MOE,Inst Acoust, Nanjing 210093, Jiangsu, Peoples R China 6.City Univ Hong Kong, State Key Lab Millimeter Waves, 83 Tat Chee Ave, Kowloon, Hong Kong, Peoples R China 7.Chinese Acad Sci, Inst Proc Engn, State Key Lab Multiphase Complex Syst, Beijing 100190, Peoples R China 8.Univ Manchester, Sch Elect & Elect Engn, Manchester M13 9PL, Lancs, England |
推荐引用方式 GB/T 7714 | Yang, Zai-xing,Liu, Lizhe,Yip, SenPo,et al. Complementary Metal Oxide Semiconductor-Compatible, High-Mobility, < 111 >-Oriented GaSb Nanowires Enabled by Vapor-Solid-Solid Chemical Vapor Deposition[J]. ACS NANO,2017,11(4):4237-4246. |
APA | Yang, Zai-xing.,Liu, Lizhe.,Yip, SenPo.,Li, Dapan.,Shen, Lifan.,...&Ho, Johnny C..(2017).Complementary Metal Oxide Semiconductor-Compatible, High-Mobility, < 111 >-Oriented GaSb Nanowires Enabled by Vapor-Solid-Solid Chemical Vapor Deposition.ACS NANO,11(4),4237-4246. |
MLA | Yang, Zai-xing,et al."Complementary Metal Oxide Semiconductor-Compatible, High-Mobility, < 111 >-Oriented GaSb Nanowires Enabled by Vapor-Solid-Solid Chemical Vapor Deposition".ACS NANO 11.4(2017):4237-4246. |
入库方式: OAI收割
来源:过程工程研究所
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