Bonding quartz wafers by the atom transfer radical polymerization of the glycidyl methacrylate at mild temperature
文献类型:期刊论文
作者 | Zhao JY ; Shang ZP ; Gao LX |
刊名 | sensors and actuators a-physical
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出版日期 | 2007 |
卷号 | 135期号:1页码:257-261 |
关键词 | SILICON-ON-INSULATOR CAPILLARY-ELECTROPHORESIS ROOM-TEMPERATURE ANALYSIS SYSTEMS SURFACE-DENSITY THIN-LAYERS AMINE GROUP GLASS DEVICES TECHNOLOGY |
ISSN号 | 0924-4247 |
通讯作者 | gao lx |
中文摘要 | in this paper, we presented a novel covalent bonding process between two quartz wafers at 300 degrees c. high-quality wafer bonding was formed by the hydroxylization, aminosilylation and atom transfer radical polymerization (atrp) of glycidyl methacrylate (gma), respectively, on quartz wafer surfaces, followed by close contact of the gma functional wafer and the aminosilylation wafer, the epoxy group opening ring reaction was catalyzed by the amino and solidified to form the covalent bonding of the quartz wafers. the shear force between two wafers in all bonding samples was higher than 1.5 mpa. microfluidic chips bonded by the above procedures had high transparency and the present procedure avoided the adhesive to block or flow into the channel. |
收录类别 | SCI |
语种 | 英语 |
WOS记录号 | WOS:000245796300039 |
公开日期 | 2010-07-13 |
源URL | [http://ir.ciac.jl.cn/handle/322003/14399] ![]() |
专题 | 长春应用化学研究所_长春应用化学研究所知识产出_期刊论文 |
推荐引用方式 GB/T 7714 | Zhao JY,Shang ZP,Gao LX. Bonding quartz wafers by the atom transfer radical polymerization of the glycidyl methacrylate at mild temperature[J]. sensors and actuators a-physical,2007,135(1):257-261. |
APA | Zhao JY,Shang ZP,&Gao LX.(2007).Bonding quartz wafers by the atom transfer radical polymerization of the glycidyl methacrylate at mild temperature.sensors and actuators a-physical,135(1),257-261. |
MLA | Zhao JY,et al."Bonding quartz wafers by the atom transfer radical polymerization of the glycidyl methacrylate at mild temperature".sensors and actuators a-physical 135.1(2007):257-261. |
入库方式: OAI收割
来源:长春应用化学研究所
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