中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Bonding quartz wafers by the atom transfer radical polymerization of the glycidyl methacrylate at mild temperature

文献类型:期刊论文

作者Zhao JY ; Shang ZP ; Gao LX
刊名sensors and actuators a-physical
出版日期2007
卷号135期号:1页码:257-261
关键词SILICON-ON-INSULATOR CAPILLARY-ELECTROPHORESIS ROOM-TEMPERATURE ANALYSIS SYSTEMS SURFACE-DENSITY THIN-LAYERS AMINE GROUP GLASS DEVICES TECHNOLOGY
ISSN号0924-4247
通讯作者gao lx
中文摘要in this paper, we presented a novel covalent bonding process between two quartz wafers at 300 degrees c. high-quality wafer bonding was formed by the hydroxylization, aminosilylation and atom transfer radical polymerization (atrp) of glycidyl methacrylate (gma), respectively, on quartz wafer surfaces, followed by close contact of the gma functional wafer and the aminosilylation wafer, the epoxy group opening ring reaction was catalyzed by the amino and solidified to form the covalent bonding of the quartz wafers. the shear force between two wafers in all bonding samples was higher than 1.5 mpa. microfluidic chips bonded by the above procedures had high transparency and the present procedure avoided the adhesive to block or flow into the channel.
收录类别SCI
语种英语
WOS记录号WOS:000245796300039
公开日期2010-07-13
源URL[http://ir.ciac.jl.cn/handle/322003/14399]  
专题长春应用化学研究所_长春应用化学研究所知识产出_期刊论文
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GB/T 7714
Zhao JY,Shang ZP,Gao LX. Bonding quartz wafers by the atom transfer radical polymerization of the glycidyl methacrylate at mild temperature[J]. sensors and actuators a-physical,2007,135(1):257-261.
APA Zhao JY,Shang ZP,&Gao LX.(2007).Bonding quartz wafers by the atom transfer radical polymerization of the glycidyl methacrylate at mild temperature.sensors and actuators a-physical,135(1),257-261.
MLA Zhao JY,et al."Bonding quartz wafers by the atom transfer radical polymerization of the glycidyl methacrylate at mild temperature".sensors and actuators a-physical 135.1(2007):257-261.

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来源:长春应用化学研究所

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